Descriptor guided fast marching method for analyzing images and systems using the same
Methods and systems for descriptor guided fast marching method based image analysis and associated systems are disclosed. A representative image processing method includes processing an image of a microelectronic device using a fast marching algorithm to obtain arrival time information for the image. The arrival time information is analyzed using a targeted feature descriptor to identify targeted features. The detection of defects is facilitated by segmenting the image. The segmented image can be analyzed to identify targeted features which are then labeled for inspection.
1. A method for identifying features and defects in an image of a microelectronic device, the method comprising:
selecting at least one starting area of the image of the microelectronic device;
processing the image of the microelectronic device using a fast marching method by working away from the at least one starting area, wherein the image includes the features arranged in a pattern;
producing an arrival time image based on processing of the image;
independent of the pattern of the features,
evaluating the arrival time image using a feature descriptor and a targeted defect descriptor, wherein at least one of the feature descriptor or target defect descriptor segments the arrival time image based on intensity,
identifying the features in the image of the microelectronic device based on the evaluation of the arrival time image using the feature descriptor, and
identifying defects, if any, in the image of the microelectronic device based on the evaluation of the arrival time image using the targeted defect descriptor;
labelling the identified features with feature identifiers;
labelling the identified defects with defect identifiers that are different from the feature identifiers; and
displaying the image of the microelectronic device for visual inspection, wherein the displayed image of the microelectronic device includes the labelled features and labelled defects, if any.
2. The method of claim 1 , wherein the displayed image of the microelectronic device is an electron microscope image with labelled features and labeled defects.
3. The method of claim 1 , wherein the displayed image of the microelectronic device is a non-segmented image.
4. The method of claim 1 , wherein processing the image using the fast marching method includes converting intensity data of the image to arrival time information for producing the arrival time image.
5. The method of claim 1 , wherein the displayed image of the microelectronic device is a labelled raw image of the microelectronic device.
6. The method of claim 1 , wherein the defects are associated with the features, wherein the features and defects are unobstructed by their corresponding labels.