IP Library Granted Patent US 10,612,153
Granted Patent B2
US 10,612,153 · App. 15/615,648 · Granted Apr 7, 2020

Method for electrochemical roughening of thin film electrodes

Inventors: Anna Nikolaevna Ivanovskaya (Mountain View, CA); Vanessa Tolosa (Oakland, CA); Dylan Dahlquist (Folsom, CA); Satinderpall S. Pannu (Pleasanton, CA); Kedar G. Shah (San Francisco, CA); Angela C. Tooker (Dublin, CA); Fang Qian (Santa Cruz, CA)
Assignee: Lawrence Livermore National Security, LLC
C25F3/14C25F3/02C25F7/00
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,612,153
App. No.
15/615,648
Granted
Apr 7, 2020
Kind
B2
Abstract

The present invention relates to surface roughening methods and more particularly to a method for electrochemical roughening of thin film macro- and micro-electrodes. In one embodiment, an electrochemical etch template is formed comprising polymer particles adsorbed on a surface of a substrate to be roughened, followed by electrochemically etching of exposed regions of the substrate between the polymer particles in the electrochemical etch template so as to selectively roughen the surface of the substrate. In another embodiment, a surface of the electrode is immersed in either a adsorbing acidic solution, such as sulfuric acid, or a non-adsorbing acidic solution, such as perchloric acid, followed by electrochemically pulse etching the surface of the substrate at a narrow frequency range for adsorbing acidic solutions, or at a wide frequency range for non-adsorbing acidic solutions.

Claims (17)

1. A method of electrochemically roughening a substrate, comprising:

forming an electrochemical etch template comprising polymer particles adsorbed on a surface of a substrate to be roughened; and

electrochemically etching exposed regions of the substrate defined by voids between the polymer particles in the electrochemical etch template so as to selectively roughen the surface of the substrate.

2. The method of claim 1 ,

wherein the step of forming the electrochemical etch template includes coating a surface of the substrate with an aqueous solution comprising polymer and acid, and heating the aqueous solution so that the polymer forms a solid domain of a liquid crystal which forms an electrochemical etch template on the surface of the substrate.

3. The method of claim 1 ,

wherein the step of forming the electrochemical etch template includes coating a surface of the substrate with polystyrene microspheres.

4. A method of electrochemically roughening a Pt thin film substrate, comprising:

immersing a surface of the substrate in an adsorbing acidic solution; and

electrochemically pulse etching the surface of the substrate, wherein the electrochemical pulse etching is performed in a frequency range of greater than 200 Hz to about 450 Hz.

5. The method of claim 4 ,

wherein the adsorbing acidic solution is sulfuric acid.

6. A method of electrochemically roughening a Pt thin film substrate, comprising:

immersing a surface of the substrate in a non-adsorbing acidic solution; and

electrochemically pulse etching the surface of the substrate, wherein the electrochemical pulse etching is performed in a frequency range of about 250 Hz to about 5000 Hz.

7. The method of claim 6 ,

wherein the non-adsorbing acidic solution is perchloric acid.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2020
From: QIAN, FANG; IVANOVSKAYA, ANNA NIKOLAEVNA; TOOKER, ANGELA C.; DAHLQUIST, DYLAN; SHAH, KEDAR G.; PANNU, SATINDERPALL S.; TOLOSA, VANESSA
To: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC.
Reel/Frame 053690/0597 →
CONFIRMATORY LICENSE Recorded Apr 7, 2020
From: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 052331/0245 →
Continuity (2)
Provisional Application 62346415 · Jun 6, 2016
Related Publication 20170350034A1 · Dec 7, 2017