Optoelectronic modules having a silicon substrate, and fabrication methods for such modules
View Patent ↗Optoelectronic modules include a silicon substrate in which or on which there is an optoelectronic device. An optics assembly is disposed over the optoelectronic device, and a spacer separates the silicon substrate from the optics assembly. Methods of fabricating such modules also are described.
1. An optoelectronic module comprising:
a silicon substrate in which or on which is an optoelectronic device;
an optics assembly disposed over the optoelectronic device; and
a spacer separating the silicon substrate from the optics assembly, wherein the spacer is substantially opaque to, or significantly attenuates, light at wavelengths emitted and/or detectable by the optoelectronic device,
wherein the spacer extends, in a direction away from the optics assembly, beyond an exterior surface of the silicon substrate.
2. The optoelectronic module of claim 1 :
wherein the spacer laterally surrounds, and is in direct contact with lateral sides of, the silicon substrate.
3. The optoelectronic module of claim 1 wherein the optoelectronic device is a light emitting element formed in, or mounted on, the silicon substrate.
4. The optoelectronic module of claim 1 wherein the optoelectronic device is a light detecting element formed in the silicon substrate.
5. The optoelectronic module of claim 1 including an optical filter intersecting a light path to or from the optoelectronic device.
6. The optoelectronic module of claim 1 including a focal length correction layer intersecting a light path to or from the optoelectronic device.