Reliable packaging and interconnect structures
View Patent ↗Methods and apparatus for forming a semiconductor device are provided which may include any number of features. One feature is a method of forming an interconnect structure that results in the interconnect structure having a top surface and portions of the side walls of the interconnect structure covered in a dissimilar material. In some embodiments, the dissimilar material can be a conductive material or a nano-alloy. The interconnect structure can be formed by removing a portion of the interconnect structure, and covering the interconnect structure with the dissimilar material. The interconnect structure can comprise a damascene structure, such as a single or dual damascene structure, or alternatively, can comprise a silicon-through via (TSV) structure.
1. A semiconductor device, comprising
a substrate having a dielectric region on the substrate;
an interconnect structure extending within at least one trench in the dielectric region;
at least one gap between at least a portion of a sidewall of the interconnect structure and at least a portion of a wall of the trench; and
a dissimilar material disposed on and covering a top surface and a portion of the sidewall of the interconnect structure to at least partially fill the gap, wherein the dissimilar material comprises an inner layer in contact with the top surface of the interconnect structure and at least one outer layer covering the inner layer.
2. The semiconductor device of claim 1 , wherein the inner layer and the outer layer of the dissimilar material have the same alloying elements but different atomic compositions.
3. The semiconductor device of claim 1 , wherein the inner layer and the outer layer of the dissimilar material have different alloying elements.
4. The semiconductor device of claim 1 , wherein the inner layer of the dissimilar material fills the gap between the sidewall of the interconnect structure and the wall of the trench.
5. The semiconductor device of claim 4 , wherein the inner layer of the dissimilar material covers at least 10% of a length of the sidewall of the interconnect structure.
6. The semiconductor device of claim 1 , wherein both the inner layer and the outer layer of the dissimilar material fill the gap between the sidewall of the interconnect structure and the wall of the trench.
7. The semiconductor device in claim 1 , wherein the dissimilar material comprises a barrier layer.
8. An electrical interconnection comprising
a dielectric region on a substrate;
a first interconnect structure extending within the dielectric region;
at least one gap between at least a portion of a sidewall of the first interconnect structure and a wall of the dielectric region; and
a second interconnect structure stacked vertically on the first interconnect structure;
a gap filling material at least partially filling the gap between the sidewall of the first interconnect structure and the wall of the dielectric region,
wherein a bottom surface of second interconnect structure is in direct contact with the top surface of the first interconnect structure or the gap filling material and not in contact with the dielectric region.
9. The electrical interconnection of claim 8 , wherein the gap filling material at least partially covers the top surface of the first interconnect region.
10. The electrical interconnection of claim 8 , wherein the dielectric region is a first dielectric region, the device further comprising a second dielectric region surrounding the second interconnect structure and in contact with the gap filling material.
11. The electrical interconnection of claim 8 , wherein the gap filling material comprises a barrier for the interconnect structure.
12. The electrical interconnection of claim 8 , wherein the dielectric region is a first dielectric region, the electrical interconnection further comprising a second dielectric region around the second interconnect structure and in contact with a portion of the gap filling material, the gap filling material comprising a barrier between the second dielectric region and the first interconnect structure.
13. An electrical interconnection
comprising:
a first dielectric region;
a first interconnect structure extending within the first dielectric region;
a barrier layer between at least a portion of a sidewall of the first interconnect structure and a wall of the first dielectric region;
a second dielectric region in contact with the first dielectric region; and
a second interconnect structure extending within the first dielectric region, a surface of the second interconnect structure being in direct contact with a surface of the first interconnect structure or the barrier layer.
14. The electrical interconnection of claim 13 , wherein the barrier layer provides a barrier between the first interconnect structure and the second dielectric region.