Solid-state imaging device, method of manufacturing solid-state imaging device, and electronic apparatus
The present technology relates to a solid-state imaging device that can reduce the number of steps and enhance mechanical strength, a method of manufacturing the solid-state imaging device, and an electronic apparatus. The solid-state imaging device includes a laminate including a first semiconductor substrate having a pixel region and at least one second semiconductor substrate having a logic circuit, the at least one second semiconductor substrate being bonded to the first semiconductor substrate such that the first semiconductor substrate becomes an uppermost layer, and a penetration connecting portion that penetrates from the first semiconductor substrate into the second semiconductor substrate and connects a first wiring layer formed in the first semiconductor substrate to a second wiring layer formed in the second semiconductor substrate. The first wiring layer is formed with Al or Cu. The present technology is applicable, for example, to a back-surface irradiation type CMOS image sensor.
1. An imaging device, comprising:
a first semiconductor substrate comprising a pixel region including a plurality of photodiodes and a plurality of transistors,
wherein the plurality of transistors includes at least one of a transfer transistor, a reset transistor or an amplification transistor;
a second semiconductor substrate comprising a logic circuit,
wherein the second semiconductor substrate is bonded to the first semiconductor substrate;
a first connecting portion in a first area outside the pixel region,
wherein the first connecting portion extends through the first semiconductor substrate to the second semiconductor substrate, and
wherein the first connecting portion is electrically connected with a first wiring layer in the first semiconductor substrate and a second wiring layer in the second semiconductor substrate; and
a second connecting portion in a second area other than the first area,
wherein the second connecting portion extends through the first semiconductor substrate to the second semiconductor substrate,
wherein the second connecting portion is electrically connected with the second wiring layer,
wherein the second connecting portion is electrically connected to at least one exterior wiring of a plurality of exterior wirings via an electrode pad; and
wherein the electrode pad is above an isolation region in the first semiconductor substrate.
2. The imaging device according to claim 1 , wherein
the electrode pad is between a first region of the first semiconductor substrate and a second region of the first semiconductor substrate in a cross sectional view.
3. The imaging device according to claim 1 ,
wherein the first semiconductor substrate is bonded to the second semiconductor substrate with a back surface of the first semiconductor substrate upward, and
wherein the first wiring layer is embedded on a side of the back surface.
4. The imaging device according to claim 1 , further comprising:
an opening in the first semiconductor substrate,
wherein a top surface of the first wiring layer is exposed based on the opening in the first semiconductor substrate.
5. The imaging device according to claim 1 ,
wherein the first wiring layer and the second wiring layer are connected through a plurality of first connecting portions.
6. The imaging device according to claim 1 ,
wherein the second connecting portion is independent of a connection point connected with the first wiring layer.
7. The imaging device according to claim 1 ,
wherein the first wiring layer includes a plurality of wirings.
8. The imaging device according to claim 1 ,
wherein the second wiring layer includes a plurality of wirings.
9. The imaging device according to claim 1 ,
wherein the second wiring layer includes at least a first portion and a second portion,
wherein the first portion is connected to the first connecting portion, and
wherein the second portion is connected to the second connecting portion.
10. The imaging device according to claim 9 ,
wherein the first portion and the second portion of the second wiring layer are associated with a same layer.
11. The imaging device according to claim 1 ,
wherein the first semiconductor substrate includes a silicon substrate, and
wherein at least a part of the electrode pad is above at least a part of the silicon substrate.
12. The imaging device according to claim 1 ,
wherein an insulating film is included between the electrode pad and the isolation region.
13. An electronic apparatus, comprising:
an imaging device including:
a first semiconductor substrate comprising a pixel region including a plurality of photodiodes and a plurality of transistors,
wherein the plurality of transistors includes at least one of a transfer transistor, a reset transistor or an amplification transistor;
a second semiconductor substrate comprising a logic circuit,
wherein the second semiconductor substrate is bonded to the first semiconductor substrate;
a first connecting portion in a first area outside the pixel region,
wherein the first connecting portion extends through the first semiconductor substrate to the second semiconductor substrate, and
wherein the first connecting portion is electrically connected with a first wiring layer in the first semiconductor substrate and a second wiring layer in the second semiconductor substrate; and
a second connecting portion in a second area other than the first area,
wherein the second connecting portion through the first semiconductor substrate to the second semiconductor substrate,
wherein the second connecting portion is electrically connected with the second wiring layer,
wherein the second connecting portion is electrically connected to at least one exterior wiring of a plurality of exterior wirings via an electrode pad; and
wherein the electrode pad is above an isolation region in the first semiconductor substrate.