Negative-working photoresist compositions for laser ablation and use thereof
A composition crosslinkable by broad band UV radiation, which after cross-linking is capable of cold ablation by a UV Excimer Laser emitting between 222 nm and 308 nm, where the composition is comprised of a negative tone resist developable in aqueous base comprising and is also comprised of a conjugated aryl additive absorbing ultraviolet radiation strongly in a range between from about 220 nm to about 310 nm. The present invention also encompasses a process comprising steps a), b) and c) a) coating the composition of claim 1 on a substrate; b) cross-linking the entire coating by irradiation with broadband UV exposure; c) forming a pattern in the cross-linked coating by cold laser ablating with a UV excimer laser emitting between 222 nm and 308 nm. Finally the present invention also encompasses The present invention also encompasses a process comprising steps a′), b′) c′) and d′) a) coating the composition of claim 1 on a substrate; b) cross-linking part of the coating by irradiation with broadband UV exposure through a mask; c) developing the coating with aqueous base removing the unexposed areas of the film, thereby forming a first pattern; d) forming a second pattern in the first pattern by laser cold laser ablating of the first pattern with a UV excimer laser emitting between 222 nm and 308 nm.
1. A process comprising steps A, B and C:
A coating on a substrate a composition for a negative tone, aqueous base developable, broadband UV resist which is also sensitive in the areas exposed to broadband irradiation to subsequent cold laser ablation by an UV Excimer Laser emitting at 308 nm wherein said composition consists of components of type a-1), b-1), c-1) a solvent, d-1) a surfactant and e-1) an inhibitor;
wherein:
a-1) are components for imparting negative tone, aqueous base developable, broadband UV resist behavior comprised of
(i) is at least one polymeric resin comprising a structure of the following formula:
wherein each of R 1b -R 5b is independently selected from the group consisting of H, F and CH 3 , R 6b is selected from the group consisting of a substituted aryl, unsubstituted aryl, substituted heteroaryl and unsubstituted heteroaryl group; R 7b is a substituted or unsubstituted benzyl group; R 8b is selected from the group consisting of a linear or branched C 2 -C 10 hydroxy alkyl group and a C 2 -C 10 hydroxy alkyl acrylate; R 9b is an acid cleavable group, v=10-40 mole %, w=0-35 mole %, x=0-60 mole %, y=10-60 mole % and z=0-45 mole %,
(ii) is one or more free radical initiators activated by actinic radiation, and
(iii) is one or more crosslinkable acrylated monomers capable of undergoing free radical crosslinking wherein the acrylate functionality is greater than 1;
b-1) is a cold laser ablation excimer laser sensitizer component system consisting of (II);
wherein R 3 is selected from the group consisting of hydrogen, an alkyl group, an alkylenefluoroalkyl group, an alkylene aryl group, and an alkyleneoxyalkyl group and X is selected from the group consisting of Cl, Br or I; and further wherein said cold laser ablation excimer laser sensitizer component system comprises from 2 to 10 wt % of the composition, and wherein the composition is one which can be coated to a thickness from 30 to 60 microns;
B cross-linking the entire coating by blanket irradiation with broadband UV exposure; and
C forming a pattern in the cross-linked coating by cold laser ablating with a UV excimer laser emitting at 308 nm.
2. The process of claim 1 wherein, b1), the conjugated aryl additive is (II), is one wherein, R 3 is an alkyl group, and X is Cl.
3. The process of claim 1 where the broadband UV exposure is between 350 and 450 nm.
4. The process of claim 1 wherein said solvent is selected from the group consisting of propylene glycol mono-alkyl ethers, propylene glycol alkyls, 2-heptanone, 3-methoxy-3-methyl butanol, butyl acetate, diglyme, ethylene glycol monoethyl ether acetate, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol monoethyl ether, ethylene glycol monoethyl ether acetate, ethylene glycol monomethyl acetate, methyl ethyl ketone, 2-heptanone, monooxymonocarboxylic acid esters, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyactetate, ethyl ethoxyacetate, ethoxy ethyl propionate, methyl 3-oxypropionate, ethyl 3-oxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 2-oxypropionate, ethyl 2-oxypropionate, ethyl 2-hydroxypropionate, ethyl 3-hydroxypropionate, propyl 2-oxypropionate, methyl 2-ethoxypropionate, propyl 2-methoxy propionate, propylene glycol monomethyl ether acetate and mixtures thereof.
5. A process comprising steps A, B, C and D:
A coating on a substrate a composition for a negative tone, aqueous base developable, broadband UV resist which is also sensitive in the areas exposed to broadband irradiation to subsequent cold laser ablation by an UV Excimer Laser emitting at 308 nm wherein, said composition consists of components of type a-1), b-1), c-1) a solvent, d-1) a surfactant and e-1) an inhibitor;
wherein:
a-1) are components for imparting negative tone, aqueous base developable, broadband UV resist behavior comprised of
(i) is at least one polymeric resin comprising a structure of the following formula:
wherein each of R 1b -R 5b is independently selected from the group consisting of H, F and CH 3 , R 6b is selected from the group consisting of a substituted aryl, unsubstituted aryl, substituted heteroaryl and unsubstituted heteroaryl group; R 7b is a substituted or unsubstituted benzyl group; R 8b is selected from the group consisting of a linear or branched C 2 -C 10 hydroxy alkyl group and a C 2 -C 10 hydroxy alkyl acrylate; R 9b is an acid cleavable group, v=10-40 mole %, w=0-35 mole %, x=0-60 mole %, y=10-60 mole % and z=0-45 mole %,
(ii) is one or more free radical initiators activated by actinic radiation, and
(iii) is one or more crosslinkable acrylated monomers capable of undergoing free radical crosslinking wherein the acrylate functionality is greater than 1;
b-1) is a cold laser ablation excimer laser sensitizer component system consisting of (II);
wherein R 3 is selected from the group consisting of hydrogen, an alkyl group, an alkylenefluoroalkyl group, an alkylene aryl group, and an alkyleneoxyalkyl group and X is selected from the group consisting of Cl, Br or I; and further wherein said cold laser ablation excimer laser sensitizer component system comprises from 2 to 10 wt % of the composition, and wherein the composition is one which can be coated to a thickness from 30 to 60 microns,
B cross-linking part of the coating by irradiation with broadband UV exposure through a mask;
C developing the coating with aqueous base removing the unexposed areas of the coating, thereby forming a first pattern;
D forming a second pattern in the first pattern by cold laser ablating of the first pattern with a UV excimer laser emitting at 308 nm.
6. The process of claim 5 wherein, b1), the conjugated aryl additive (II), is one wherein R 3 is an alkyl group, and X is Cl.
7. The process of claim 5 wherein said solvent is selected from the group consisting of propylene glycol mono-alkyl ethers, propylene glycol alkyls, 2-heptanone, 3-methoxy-3-methyl butanol, butyl acetate, diglyme, ethylene glycol monoethyl ether acetate, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol monoethyl ether, ethylene glycol monoethyl ether acetate, ethylene glycol monomethyl acetate, methyl ethyl ketone, 2-heptanone, monooxymonocarboxylic acid esters, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyactetate, ethyl ethoxyacetate, ethoxy ethyl propionate, methyl 3-oxypropionate, ethyl 3-oxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 2-oxypropionate, ethyl 2-oxypropionate, ethyl 2-hydroxypropionate, ethyl 3-hydroxypropionate, propyl 2-oxypropionate, methyl 2-ethoxypropionate, propyl 2-methoxy propionate, propylene glycol monomethyl ether acetate and mixtures thereof.