IP Library Granted Patent US 10,209,275
Granted Patent B2
US 10,209,275 · App. 15/633,736 · Granted Feb 19, 2019

Detachable probe card interface

Inventors: Ka Ng Chui (Menlo Park, CA); Chongliang Ding (Shannxi, CN); Xing Yubing (Henan, CN); Xu Guochun (Beijing, CN)
Assignee: CORAD TECHNOLOGY INC.
G01R1/07378G01R1/07342G01R31/2886
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Quick Facts
Patent No.
US 10,209,275
App. No.
15/633,736
Granted
Feb 19, 2019
Kind
B2
Abstract

A detachable probe card interface comprises a space transformer, a deformable connector, and a carrier board. The space transformer includes first electrical contacts and second electrical contacts, wherein the first electrical contacts are coupled to the second electrical contacts through one or more layers of the space transformer. The deformable connector includes a plurality of conductive particles arranged in columns coinciding with the second electrical contacts, wherein the conductive particles compress with one another when one or more forces are exerted on the deformable connector. The carrier board includes a plurality of vias aligned with the plurality of second electrical contacts on the space transformer, and a plurality of conductors disposed within the vias. Each of the conductors is coupled to a respective one of the second electrical contacts and protrudes into the deformable connector to establish a transmission path between the second electrical contact and one or more columns of the conductive particles.

Claims (41)

1. A probe card interface, comprising:

a space transformer including a plurality of first electrical contacts and a plurality of second electrical contacts, wherein the first electrical contacts are coupled to the second electrical contacts through one or more layers of the space transformer;

a deformable connector including a plurality of conductive particles arranged in columns coinciding with the plurality of second electrical contacts, wherein the conductive particles are configured to compress with one another when one or more forces are exerted on the deformable connector; and

a carrier board, disposed between the space transformer and the deformable connector, to add rigidity to the space transformer and prevent the space transformer from bending under external forces, the carrier board including:

a plurality of vias aligned with the plurality of second electrical contacts on the space transformer; and

a plurality of conductors disposed within the vias, wherein each of the conductors is coupled to a respective one of the second electrical contacts and protrudes into the deformable connector to establish a transmission path between the second electrical contact and one or more columns of the conductive particles.

2. The probe card interface of claim 1 , wherein the deformable connector further comprises:

an elastic shield disposed around each column of the conductive particles, wherein the elastic shield is configured to deform when the one or more forces are exerted on the deformable connector.

3. The probe card interface of claim 1 , wherein the columns of conductive particles are configured to establish a transmission path along a cross-section of the deformable connector when the one or more forces are exerted on the deformable connector.

4. The probe card interface of claim 1 , wherein the one or more forces are provided, at least in part, by the plurality of conductors protruding into the deformable connector.

5. The probe card interface of claim 1 , wherein the carrier board comprises a layer of ceramic material to provide structural support for the space transformer.

6. A probe head assembly, comprising:

a probe head including a plurality of pins;

a space transformer including a plurality of first electrical contacts and a plurality of second electrical contacts, wherein the first electrical contacts are coupled to the second electrical contacts through one or more layers of the space transformer;

a deformable connector including a plurality of conductive particles arranged in columns coinciding with the plurality of second electrical contacts, wherein the conductive particles are configured to compress with one another when one or more forces are exerted on the deformable connector; and

a carrier board, disposed between the space transformer and the deformable connector, to add rigidity to the space transformer and prevent the space transformer from bending under external forces, the carrier board including:

a plurality of vias aligned with the plurality of second electrical contacts on the space transformer; and

a plurality of conductors disposed within the vias, wherein each of the conductors is coupled to a respective one of the second electrical contacts and protrudes into the deformable connector to establish a transmission path between the second electrical contact and one or more columns of the conductive particles.

7. The probe head assembly of claim 6 , wherein the deformable connector further comprises:

an elastic shield disposed around each column of the conductive particles, wherein the elastic shield is configured to deform when the one or more forces are exerted on the deformable connector.

8. The probe head assembly of claim 6 , wherein the columns of conductive particles are configured to establish a transmission path along a cross-section of the deformable connector when the one or more forces are exerted on the deformable connector.

9. The probe head assembly of claim 6 , wherein the one or more forces are provided, at least in part, by the plurality of conductors protruding into the deformable connector.

10. The probe head assembly of claim 6 , wherein the carrier board comprises a layer of ceramic material to provide structural support for the space transformer.

11. The probe head assembly of claim 6 , wherein the first electrical contacts on the space transformer are aligned with the plurality of pins in the probe head.

12. A probe card, comprising:

a first circuit including a plurality of electrical traces;

a probe head including a plurality of pins;

a space transformer including a plurality of first electrical contacts and a plurality of second electrical contacts, wherein the first electrical contacts are coupled to the second electrical contacts through one or more layers of the space transformer;

a deformable connector including a plurality of conductive particles arranged in columns coinciding with the plurality of second electrical contacts, wherein the conductive particles are configured to compress with one another when one or more forces are exerted on the deformable connector; and

a carrier board, disposed between the space transformer and the deformable connector, to add rigidity to the space transformer and prevent the space transformer from bending under external forces, the carrier board including:

a plurality of vias aligned with the plurality of second electrical contacts on the space transformer; and

a plurality of conductors disposed within the vias, wherein each of the conductors is coupled to a respective one of the second electrical contacts and protrudes into the deformable connector to establish a transmission path between the second electrical contact and one or more columns of the conductive particles.

13. The probe card of claim 12 , wherein the deformable connector further comprises:

an elastic shield disposed around each column of the conductive particles, wherein the elastic shield is configured to deform when the one or more forces are exerted on the deformable connector.

14. The probe card of claim 12 , wherein the columns of conductive particles are configured to establish a transmission path along a cross-section of the deformable connector when the one or more forces are exerted on the deformable connector.

15. The probe card of claim 12 , wherein the one or more forces are provided, at least in part, by the plurality of conductors protruding into the deformable connector.

16. The probe card of claim 12 , wherein the carrier board comprises a layer of ceramic material to provide structural support for the space transformer.

17. The probe card of claim 12 , wherein the first electrical contacts on the space transformer are aligned with the plurality of pins in the probe head of the probe card.

18. The probe card of claim 12 , wherein the first electrical contacts on the space transformer are aligned with the plurality of pins in the probe head, and wherein the second electrical contacts on the space transformer are aligned with the electrical traces on the first circuit.

19. The probe card of claim 12 , wherein an electrical connection is established between each of the plurality of pins and a respective one of the plurality of electrical traces when the one or more forces are exerted on the deformable connector.

20. The probe card of claim 12 , wherein the one or more forces are provided, at least in part, by one or more mechanisms used to mechanically couple the probe head to the first circuit.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 8, 2023
From: ZEROONETEST TECHNOLOGY INC.
To: ZERO ONE SEMICONDUCTOR TECHNOLOGY (CHANGZHOU) CO., LTD.
Reel/Frame 063941/0248 →
CHANGE OF NAME Recorded Jan 20, 2022
From: CORAD TECHNOLOGY INC.
To: ZERO ONE TECHNOLOGY, INC.
Reel/Frame 059579/0249 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 20, 2022
From: ZERO ONE TECHNOLOGY, INC.
To: ZEROONETEST TECHNOLOGY INC.
Reel/Frame 058714/0315 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 21, 2017
From: CHUI, KA NG; DING, CHONGLIANG; YUBING, XING; GUOCHUN, XU
To: CORAD TECHNOLOGY INC.
Reel/Frame 043070/0126 →
Continuity (1)
Related Publication 20180372778A1 · Dec 27, 2018
Cited By (1)
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