Composite matrix using a hybrid deposition technique
Provided herein are methods of forming a composite matrix on a porous substrate or a non-porous substrate, the methods including subjecting the substrate to a first deposition method to apply a first coating including first ceramic or metallic particles and form a coated substrate and subjecting the coated substrate to atomic layer deposition to apply a second coating and form the composite matrix, wherein the second coating includes second ceramic or metallic particles.
1. A method of forming a composite matrix on a porous substrate, the method comprising:
(a) subjecting the porous substrate to a first deposition method comprising electrophoretic deposition (EPD) to apply a first coating comprising first ceramic or metallic particles and thereby form a coated substrate; and
(b) subjecting the coated substrate to a second deposition method to apply a second coating comprising second ceramic or metallic particles and thereby form the composite matrix, wherein the second deposition method comprises atomic layer deposition (ALD) A ,
wherein step (a) further comprises high pressure infiltration, vacuum slurry infiltration, or both,
and the second coating infiltrates the first coating.
2. The method of claim 1 , wherein the first deposition method further comprises chemical vapor infiltration (CVI), physical vapor deposition (PVD), or any combination thereof.
3. The method of claim 1 , wherein the porous substrate is a non-conductive substrate and the method further comprises depositing a conductive material on the porous substrate prior to subjecting the porous substrate to the first deposition method, and the depositing of the conductive material is optionally via ALD.
4. The method of claim 1 , wherein the porous substrate comprises a manufactured open porosity architecture.
5. The method of claim 1 , wherein the composite matrix comprises a thickness of at least 1 μm and up to 200 μm.
6. The method of claim 1 , wherein the first coating infiltrates the pores of the porous substrate substantially uniformly.
7. The method of claim 1 , wherein the first coating comprises submicron porosities and the second coating infiltrates the submicron porosities, such that the composite matrix is nonporous.
8. The method of claim 1 , wherein the first ceramic or metallic particles and the second ceramic or metallic particles have compatible thermal expansion properties.
9. The method of claim 1 , wherein each of the first coating and the second coating independently comprise at least one of SiC (silicon carbide), ZrSiO 4 (zircon), tungsten carbide (WC), Kaolinite, aluminum oxide (Al 2 O 3 ), lead oxide (PbO), silicon dioxide (SiO 2 ), titanium dioxide (TiO 2 ), silicon nitride (Si 3 N 4 ), boron nitride (BN), boron carbide (B 4 C), calcium hexaboride (CaB 6 ), titanium boride (TiB 2 ), zinc boride (ZnB 2 ), zirconium dioxide (ZrO 2 ), molybdnum silicide (MoSi 2 ), graphite, Cu, Ta, Co, Au, Ag, Pt, W, Mb and any combination thereof.
10. The method of claim 1 , wherein the first coating comprises particles of an oxide or particles comprising an oxidized surface.
11. The method of claim 1 , wherein the subjecting of step (b) is performed substantially free of a metal-halide.
12. The method of claim 1 , wherein the ALD of the second coating has a growth rate of at least 1.5Å per cycle.
13. The method of claim 1 , wherein the first coating is not annealed or heat sintered after step (a) and the composite matrix is not annealed or heat sintered after step (b).
14. The method of claim 1 , wherein the temperature at which each step is performed is less than or equal to 300° C.
15. The method of claim 1 , wherein the first coating is applied and dried at a temperature in a range of about 20° C. to about 200° C.