METHODS AND APPARATUS FOR PROCESSING ITEMS WITH VERTICALLY ORIENTED PROCESSING TOOLS IN A CLEAN SPACE
The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools in at least a vertical dimension relative to each other.
1 . A fabricator facility comprising:
a primary clean space, wherein the primary cleanspace comprises an outer vertical wall and an inner vertical wall, with the primary cleanspace located between the outer vertical wall and the inner vertical wall;
an air source to flow air through the primary cleanspace in a predetermined uni-direction from the outer vertical wall to the inner vertical wall;
a plurality of support levels configured to support a plurality of processing tools, the plurality of support levels being disposed at different vertical levels;
an apparatus for processing a product comprising a chassis for positioning a processing tool comprising a tool body and a tool port in the fabrication facility comprising the primary clean space, the apparatus for processing a product comprising:
the processing tool comprising the tool body and the tool port;
a chassis for mounting the processing tool onto, said chassis comprising an extended position and a closed position;
a chassis plate of the chassis; said chassis plate comprising a mating surface for receiving the tool body;
a base plate for positioning the chassis plate in the closed position, wherein when the chassis is in the closed position, the tool port is sealed within a primary cleanspace and the tool body is exterior to the primary cleanspace; and
wherein the processing tool is mated to the chassis plate; and
a carrier comprising the product.
2 . The fabricator facility of claim 1 wherein the product is a pharmaceutical.
3 . The fabricator facility of claim 1 wherein the product comprises a microfluidic processor.
4 . The fabricator facility of claim 1 wherein the processing tool comprises multiple chambers.
5 . The fabricator facility of claim 2 wherein the pharmaceutical is in powder form.
6 . The fabricator facility of claim 2 wherein the pharmaceutical is in liquid form.
7 . A fabricator facility comprising:
a primary clean space, wherein the primary cleanspace comprises an outer vertical wall and an inner vertical wall, with the primary cleanspace located between the outer vertical wall and the inner vertical wall;
an air source to flow air through the primary cleanspace in a predetermined uni-direction from the inner vertical wall to the outer vertical wall;
a plurality of support levels configured to support a plurality of processing tools, the plurality of support levels being disposed at different vertical levels;
an apparatus for processing a product comprising a chassis for positioning a processing tool comprising a tool body and a tool port in the fabrication facility comprising the primary clean space, the apparatus for processing a product comprising:
the processing tool comprising the tool body and the tool port;
a chassis for mounting the processing tool onto, said chassis comprising an extended position and a closed position;
a chassis plate of the chassis; said chassis plate comprising a mating surface for receiving the tool body;
a base plate for positioning the chassis plate in the closed position, wherein when the chassis is in the closed position, the tool port is sealed within a primary cleanspace and the tool body is exterior to the primary cleanspace; and
wherein the processing tool is mated to the chassis plate; and
a carrier comprising the product.
8 . The fabricator facility of claim 7 wherein the product is a pharmaceutical.
9 . The fabricator facility of claim 7 wherein the product comprises a microfluidic processor.
10 . The fabricator facility of claim 7 wherein the processing tool comprises multiple chambers.
11 . The fabricator facility of claim 8 wherein the pharmaceutical is in powder form.
12 . The fabricator facility of claim 8 wherein the pharmaceutical is in liquid form.