Composite manganese nitride / low-k dielectric cap
View Patent ↗A semiconductor device includes a metal-containing structure such as a copper-containing wire or plug and a composite capping layer formed over the metal-containing structure. The composite capping layer includes a manganese-containing layer disposed over the metal-containing structure, a silicon-containing low-k dielectric layer disposed over the manganese-containing layer, and an intermediate layer between the manganese-containing layer and the silicon-containing low-k dielectric layer. The intermediate layer is the reaction product of the manganese-containing layer and the silicon-containing low-k dielectric layer.
1. A method of forming a composite capping layer over a metal-containing structure, the method comprising:
forming a manganese-containing layer over a metal-containing structure, wherein the metal-containing structure has a topmost surface that is located entirely beneath a bottommost surface of the manganese-containing layer;
forming a silicon-containing low-k dielectric layer over the manganese-containing layer; and
reacting the manganese-containing layer and the silicon-containing low-k dielectric layer to form an intermediate layer between the manganese-containing layer and the silicon-containing low-k dielectric layer.
2. The method of claim 1 , wherein the metal-containing structure comprises elemental copper, elemental cobalt, a copper alloy or a cobalt alloy.
3. The method of claim 1 , wherein the manganese-containing layer is formed selectively over the metal-containing structure.
4. The method of claim 1 , wherein the manganese-containing layer is formed directly over the metal-containing structure.
5. The method of claim 1 , wherein prior to forming the manganese-containing layer, a metal capping layer is formed on a surface of the metal-containing structure.
6. The method of claim 1 , further comprising annealing the silicon-containing low-k dielectric layer at a temperature of 300° C. to 400° C.
7. The method of claim 1 , wherein the metal-containing structure is a metal line or conductive plug.
8. The method of claim 1 , wherein the manganese-containing layer comprises elemental magnesium or magnesium nitride having the formula MnN x , wherein 0.1≤x≤2.
9. The method of claim 1 , wherein the manganese-containing layer is crystalline.
10. The method of claim 1 , wherein the magnesium-containing layer is amorphous.
11. The method of claim 1 , wherein the forming the manganese-containing layer comprises:
depositing a magnesium metal; and
nitridizing the magnesium metal.
12. The method of claim 1 , wherein the silicon-containing low-k dielectric layer has a porosity up to 15%.
13. The method of claim 1 , wherein the silicon-containing low-k dielectric layer is amorphous.
14. The method of claim 1 , wherein the silicon-containing low-k dielectric layer is selected from the group consisting of amorphous silicon carbonitride (a-SiCN), amorphous oxidized silicon carbon material (a-SiCO), amorphous oxidized silicon carbonitride (a-SiCNO), amorphous silicon oxynitride (a-SiNO), and amorphous silicon oxide, and their respective hydrogenated compounds.
15. The method of claim 1 , wherein the reacting the manganese-containing layer and the silicon-containing low-k dielectric layer occurs during the formation of the silicon-containing low-k dielectric layer.
16. The method of claim 1 , wherein the reacting the manganese-containing layer and the silicon-containing low-k dielectric layer occurs during an annealing process that follows the formation of the silicon-containing low-k dielectric layer.
17. The method of claim 1 , wherein the intermediate layer comprises SiCNMnO or SiMnO.
18. The method of claim 1 , wherein the manganese-containing layer has an initial thickness and the silicon-containing low-k dielectric layer has an initial thickness, and wherein after the reacting the initial thickness of both the manganese-containing layer and the silicon-containing low-k dielectric layer is reduced.
19. The method of claim 1 , wherein the intermediate layer has a dielectric constant of 2.4 to 3.0.
20. A method of forming a composite capping layer over a metal-containing structure, the method comprising:
forming a manganese-containing layer over a metal-containing structure;
forming a silicon-containing low-k dielectric layer over the manganese-containing layer; and
reacting the manganese-containing layer and the silicon-containing low-k dielectric layer to form an intermediate layer between the manganese-containing layer and the silicon-containing low-k dielectric layer, wherein the metal-containing structure is embedded in a dielectric material and has a topmost surface that is coplanar with a topmost surface of the dielectric material, and wherein the magnesium-containing layer, the silicon-containing low-k dielectric layer, and the intermediate layer are located above the topmost surface of the dielectric material, and further wherein the silicon-containing low-k dielectric layer is located on sidewall surfaces of the intermediate layer and the magnesium-containing layer and on a topmost surface of the intermediate layer.