Metal gate structure and methods thereof
Provided is a metal gate structure and related methods that include forming a first fin and a second fin on a substrate. In various embodiments, the first fin has a first gate region and the second fin has a second gate region. By way of example, a metal-gate line is formed over the first and second gate regions. In some embodiments, the metal-gate line extends from the first fin to the second fin, and the metal-gate line includes a sacrificial metal portion. In various examples, a line-cut process is performed to separate the metal-gate line into a first metal gate line and a second gate line. In some embodiments, the sacrificial metal portion prevents lateral etching of a dielectric layer during the line-cut process.
1. A method of semiconductor device fabrication, comprising:
forming a first fin and a second fin on a substrate, the first fin having a first gate region and the second fin having a second gate region;
forming a metal-gate line over the first and second gate regions, wherein the metal-gate line extends from the first fin to the second fin, and wherein the metal-gate line includes a sacrificial metal portion; and
performing a line-cut process to separate the metal-gate line into a first metal gate line and a second gate line, wherein the sacrificial metal portion prevents lateral etching of a dielectric layer during the line-cut process.
2. The method of claim 1 , wherein the performing the line-cut process includes:
forming a patterned hard mask over the metal-gate line, wherein the patterned hard mask defines an opening; and
etching the metal-gate line through the opening.
3. The method of claim 1 , wherein the sacrificial metal portion includes a sacrificial tungsten (W) layer.
4. The method of claim 1 , wherein the metal-gate line includes an N-type work-function metal (NWFM), and wherein the line-cut process is performed before deposition of the N-type work function metal (NWFM).
5. The method of claim 1 , wherein the metal-gate line includes a P-type work-function metal (PWFM), and wherein the line-cut process is performed after deposition of the P-type work function metal (PWFM).
6. The method of claim 1 , wherein the line-cut process includes a wet etch process.
7. The method of claim 1 , wherein the line-cut process forms a line-cut region having line-cut region sidewalls, wherein the metal-gate line has a first thickness over each of the first and second gate regions, and wherein the metal-gate line has a second thickness at each of the line-cut region sidewalls.
8. The method of claim 7 , wherein the second thickness is less than the first thickness.
9. The method of claim 7 , wherein the metal-gate line includes both a P-type work-function metal (PWFM) and an N-type work-function metal (NWFM) deposited over each of the first and second gate regions, and wherein the metal-gate line includes the N-type work-function metal (NWFM) deposited at each of the line-cut region sidewalls.
10. A method, comprising:
forming a plurality of fin elements extending from a substrate, each of the plurality of fin elements including a gate region, wherein a dielectric layer is disposed between each adjacent gate region;
depositing a first work function metal layer over the gate region of each of the plurality of fin elements;
forming a sacrificial metal layer over the first work function metal layer;
after forming the sacrificial metal layer, defining a cut region using a patterned hard mask layer, wherein the patterned hard mask layer includes an opening corresponding to the defined cut region; and
performing an etching process, through the opening in the patterned hard mask layer, to remove the sacrificial metal layer and the first work function metal layer, wherein the sacrificial metal layer prevents removal of the dielectric layer during the performing the etching process.
11. The method of claim 10 , further comprising:
after performing the etching process, depositing a dielectric layer within a line-cut formed by the etching process; and
removing the sacrificial metal layer.
12. The method of claim 11 , further comprising:
depositing a second work function metal layer over the first work function metal layer and at least partially over a sidewall of the dielectric layer deposited within the line-cut.
13. The method of claim 12 , further comprising:
depositing a glue layer over the gate region of each of the plurality of fin elements; and
forming a metal layer over the glue layer.
14. The method of claim 10 , wherein the first work function metal layer includes a P-type work-function metal (PWFM).
15. The method of claim 12 , wherein the second work function metal layer includes an N-type work-function metal (NWFM).
16. The method of claim 10 , wherein the patterned hard mask layer has a larger width than a distance between adjacent sidewall spacers of an exposed gate stack.
17. A method, comprising:
forming a first gate region over a first fin and a second gate region over a second fin;
depositing a P-type work-function metal (PWFM) over the first and second gate regions, wherein the PWFM extends from the first fin to the second fin;
forming a sacrificial metal layer over the PWFM; and
performing a line-cut process to separate the PWFM into a first metal gate line and a second gate line, wherein the line-cut process forms a line-cut region having line-cut region sidewalls;
after performing the line-cut process, removing the sacrificial layer and depositing an N-type work-function metal (NWFM) over the PWFM in the first and second gate regions and along each of the line-cut region sidewalls.
18. The method of claim 17 , wherein the sacrificial metal portion prevents lateral etching of a dielectric layer during the line-cut process.
19. The method of claim 17 , wherein a thickness of the NWFM disposed over the PWFM in each of the first and second gate regions is greater than a thickness of the NWFM disposed along each of the line-cut region sidewalls.
20. The method of claim 17 , wherein the sacrificial metal layer includes a tungsten (W) layer.