IP Library Granted Patent US 10,325,854
Granted Patent B2
US 10,325,854 · App. 15/652,821 · Granted Jun 18, 2019

Interposer and semiconductor package device

Inventors: Kun-Ming Chen (Kaohsiung, TW); Yuan-Feng Chiang (Kaohsiung, TW)
Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
H01L23/5386H01L21/486H01L21/4853H01L21/4857H01L23/5383H01L23/5384H01L23/5389H01L25/105H01L25/50H01L2225/1035H01L2225/1058
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Quick Facts
Patent No.
US 10,325,854
App. No.
15/652,821
Granted
Jun 18, 2019
Kind
B2
Abstract

An interposer comprises a first conductive wire having a first terminal and a second terminal, a first oxide layer, and an encapsulant. The first oxide layer covers the first conductive wire and exposes the first terminal and the second terminal of the first conductive wire. The encapsulant covers the first oxide layer and exposes the first terminal and the second terminal of the first conductive wire.

Claims (32)

1. An interposer, comprising:

a first conductive wire having a first terminal and a second terminal;

a first oxide layer covering the first conductive wire and exposing the first terminal and the second terminal of the first conductive wire;

an encapsulant covering the first oxide layer and exposing the first terminal and the second terminal of the first conductive wire;

a second conductive wire adjacent to the first conductive wire; and

a second oxide layer covering the second conductive wire, wherein

the first conductive wire and the second conductive wire are electrically insulated by the first oxide layer and the second oxide layer, and the first oxide layer directly contacts the second oxide layer.

2. The interposer of claim 1 , further comprising a substrate, wherein the first conductive wire is adjacent to a first surface of the substrate.

3. The interposer of claim 2 , further comprising a third conductive wire adjacent to a second surface of the substrate that is opposite to the first surface of the substrate.

4. The interposer of claim 1 , wherein a dimension of a grain of the first conductive wire adjacent to a center of the first conductive wire is different from a dimension of a grain of the first conductive wire adjacent to a periphery of the first conductive wire.

5. The interposer of claim 1 , wherein the first conductive wire comprises a first conductive material, and wherein the first oxide layer comprises an oxide of the first conductive material.

6. The interposer of claim 1 , wherein a ratio of a major axis to a minor axis of a grain of the first conductive wire adjacent to a center of the first conductive wire is greater than a ratio of a major axis to a minor axis of a grain of the first conductive wire adjacent to a periphery of the first conductive wire.

7. A semiconductor package device, comprising:

a substrate;

an electronic component on the substrate; and

an interposer between the substrate and the electronic component and electrically connecting the electronic component with the substrate, wherein the interposer comprises:

a plurality of conductive wires electrically insulated from one another;

a package body encapsulating the plurality of conductive wires and exposing a portion of each of the plurality of conductive wires, the package body having a first surface and a second surface opposite to the first surface, wherein at least one of the plurality of conductive wires is substantially perpendicular to the first surface of the package body; and

a plurality of insulation layers, each of the plurality of insulation layers covering a corresponding one of the plurality of conductive wires, wherein at least two adjacent insulation layers of the plurality of insulation layers are in direct contact with each other.

8. The semiconductor package device of claim 7 , wherein the plurality of conductive wires comprise a first conductive material, and wherein the plurality of insulation layers comprise an oxide of the first conductive material.

9. The semiconductor package device of claim 7 , wherein the plurality of conductive wires are arranged in a staggered pattern.

10. The semiconductor package device of claim 7 , wherein the interposer further comprises a substrate adjacent to the plurality of conductive wires.

11. The semiconductor package device of claim 7 , wherein a ratio of a major axis to a minor axis of a grain adjacent to a center of one of the plurality of conductive wires is greater than a ratio of a major axis to a minor axis of a grain adjacent to a periphery of the one of the plurality of conductive wires.

12. The semiconductor package device of claim 7 , wherein a dimension of a grain adjacent to a center of one of the plurality of conductive wires is different from a dimension of a grain adjacent to a periphery of the one of the plurality of conductive wires.

13. The interposer of claim 1 , wherein a portion of the first terminal exposed from the encapsulant is substantially coplanar with a surface of the encapsulant and a portion of the second terminal exposed from the encapsulant is substantially coplanar with an opposite surface of the encapsulant.

14. The interposer of claim 1 , wherein a length of the first conductive wire is substantially equal to a thickness of the encapsulant.

15. The interposer of claim 4 , wherein the dimension of the grain of the first conductive wire adjacent to the center of the first conductive wire is greater than the dimension of the grain of the first conductive wire adjacent to the periphery of the first conductive wire.

16. The interposer of claim 4 , wherein the grain of the first conductive wire adjacent to the center of the first conductive wire is ellipsoidal and the grain of the first conductive wire adjacent to the periphery of the first conductive wire is substantially spherical.

17. The semiconductor package device of claim 7 , wherein the portion of each of the plurality of conductive wires exposed from the package body is substantially coplanar with the first surface of the package body.

18. The semiconductor package device of claim 7 , wherein a length of each of the plurality of conductive wires is substantially equal to a thickness of the package body.

19. The semiconductor package device of claim 12 , wherein the dimension of the grain adjacent to the center of one of the plurality of conductive wires is greater from the dimension of the grain adjacent to the periphery of the one of the plurality of conductive wires.

20. The semiconductor package device of claim 12 , wherein the grain adjacent to the center of one of the plurality of conductive wires is ellipsoidal and the grain adjacent to the periphery of the one of the plurality of conductive wires is substantially spherical.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 19, 2017
From: CHEN, KUN-MING; CHIANG, YUAN-FENG
To: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
Reel/Frame 043632/0775 →
Continuity (1)
Related Publication 20190027441A1 · Jan 24, 2019