Micro device integration into system substrate
This disclosure is related to post processing steps for integrating of micro devices into system (receiver) substrate or improving the performance of the micro devices after transfer. Post processing steps for additional structure such as reflective layers, fillers, black matrix or other layers may be used to improve the out coupling or confining of the generated LED light. In another example, dielectric and metallic layers may be used to integrate an electro-optical thin film device into the system substrate with the transferred micro devices. In another example, color conversion layers are integrated into the system substrate to create different output from the micro devices.
1. An integrated optical system comprising:
a system substrate;
a first and second plurality of electrode contact pads on the system substrate;
a first light emitting micro device mounted on the first plurality of electrode contact pads;
a second light emitting micro device mounted on the second plurality of electrode contact pads;
a planarization layer surrounding and between the first and second light emitting micro devices;
a first color conversion layer over the first light emitting micro device and a second light emitting micro device;
a bank structure deposited between the first color conversion layer and the second color conversion layer to separate the first light emitting micro device and the second light emitting device; and
a bottom reflector on the system substrate for directing light from the first and second light emitting micro devices through the first color conversion layer and the second color conversion layer.
2. The integrated optical system of claim 1 , wherein the first light emitting micro device or the second light emitting micro device is provided with connections through a top common electrode over top of both the first and second light emitting micro devices, wherein the top common electrode is a transparent conductive layer deposited on the system substrate.
3. The integrated optical system of claim 1 , wherein the planarization layer can be used before or after the first and second plurality of electrode contact pads.
4. The integrated optical system of claim 1 , further comprising a color filter mounted on the first color conversion layer and the second color conversion layer.
5. The integrated optical system of claim 4 , further comprising a black matrix mounted between the first and second plurality of electrode contact pads as a filler.
6. The integrated optical system of claim 1 , wherein a spacer is placed between the first and second light emitting micro devices.
7. The integrated optical system of claim 6 , wherein the spacer is a light confinement structure.
8. The integrated optical system of claim 1 , further comprising a reflective layer deposited between the first and second light emitting micro devices to direct the light.
9. The integrated optical system of claim 1 , wherein the first and second light emitting micro devices are not fully patterned but a horizontal condition is engineered so that the first and second plurality of electrode contact pads define an area allocated to each pixel.
10. The integrated optical system of claim 1 , wherein connection to the first and second light emitting micro devices are made through the system substrate.