IP Library Granted Patent US 10,163,751
Granted Patent B2
US 10,163,751 · App. 15/658,948 · Granted Dec 25, 2018

Heat transfer structures and methods for IC packages

Inventors: Ying-Chih Hsu (Hsinchu, TW); Alan Roth (Leander, TX); Chuei-Tang Wang (Taichung, TW); Chih-Yuan Chang (Hsinchu, TW); Eric Soenen (Austin, TX); Chih-Lin Chen (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
H01L23/3677H01L21/486H01L23/481H01L23/49822
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Quick Facts
Patent No.
US 10,163,751
App. No.
15/658,948
Granted
Dec 25, 2018
Kind
B2
Abstract

A package structure includes a first package layer, a second package layer, and a chip layer positioned between the first package layer and the second package layer. The first package layer includes an electrical signal structure electrically isolated from a first thermal conduction structure. The chip layer includes an integrated circuit (IC) chip electrically connected to the electrical signal structure, a molding material, and a through-via positioned in the molding material. The first thermal conduction structure, the through-via, and the second thermal conduction structure are configured as a low thermal resistance path from the IC chip to a surface of the second package layer opposite the chip layer.

Claims (41)

1. A package structure comprising:

a first package layer comprising an electrical signal structure and a first thermal conduction structure electrically isolated from the electrical signal structure;

a second package layer comprising a second thermal conduction structure; and

a chip layer positioned between the first package layer and the second package layer, the chip layer comprising:

an integrated circuit (IC) chip electrically connected to the electrical signal structure;

a molding material; and

a through-via positioned in the molding material,

wherein the first thermal conduction structure, the through-via, and the second thermal conduction structure are configured as a low thermal resistance path from the IC chip to a surface of the second package layer opposite the chip layer.

2. The package structure of claim 1 , wherein

the through-via is one through-via of a plurality of through-vias, and

the low thermal resistance path from the IC chip to the surface of the second package layer includes the plurality of through-vias being configured in parallel.

3. The package structure of claim 1 , wherein the first thermal conduction structure comprises redistribution lines.

4. The package structure of claim 1 , wherein the second thermal conduction structure comprises redistribution lines.

5. The package structure of claim 1 , further comprising a heat spreader positioned at the surface of the second package layer.

6. The package structure of claim 1 , further comprising a printed circuit board electrically connected to the electrical signal structure.

7. The package structure of claim 1 , wherein the IC chip comprises an on-chip thermal conduction structure having a low thermal resistance interface to the first thermal conduction structure.

8. The package structure of claim 1 , wherein the IC chip and the electrical signal structure are part of an integrated voltage regulator.

9. The package structure of claim 1 , wherein the electrical signal structure comprises an inductive device.

10. The package structure of claim 1 , wherein the package structure is part of an integrated fan-out package.

11. The package structure of claim 1 , wherein the IC chip comprises:

a first device, and

a second device.

12. A package structure comprising:

a printed circuit board (PCB);

a first package layer over the PCB, the first package layer comprising:

an electrical signal structure electrically connected to the PCB; and

a first thermal conduction structure electrically isolated from the electrical signal structure;

a second package layer over the first package layer, the second package layer comprising a second thermal conduction structure electrically isolated from the electrical signal structure; and

a chip layer positioned between the first package layer and the second package layer, the chip layer comprising:

an integrated circuit (IC) chip electrically connected to the electrical signal structure;

a molding material; and

a set of through-vias positioned in the molding material and the second package layer,

wherein the first thermal conduction structure, the set of through-vias, and the second thermal conduction structure are configured as a low thermal resistance path from the IC chip to a surface of the second package layer opposite the chip layer.

13. The package structure of claim 12 , further comprising:

a set of under-bump metallurgies (UBMs) positioned between the PCB and the electrical signal structure.

14. The package structure of claim 12 , further comprising:

a heat spreader positioned at the surface of the second package layer.

15. The package structure of claim 12 , wherein

the package structure is part of an integrated fan-out package,

the first thermal conduction structure comprises a first set of post-passivation interconnect (PPI) structures, and

the second thermal conduction structure comprises a second set of PPI structures.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 25, 2017
From: HSU, YING-CHIH; ROTH, ALAN; WANG, CHUEI-TANG; CHANG, CHIH-YUAN; SOENEN, ERIC; CHEN, CHIH-LIN
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 043092/0067 →
Continuity (2)
Provisional Application 62427681 · Nov 29, 2016
Related Publication 20180151466A1 · May 31, 2018