Semiconductor device
A semiconductor device includes a power element and a heat sensing element configured to detect a temperature of the power element. The power element includes lateral MOS transistors having drains and gate electrodes, two of the drains being shorter in length than the remaining drains and two of the gate electrodes being shorter in length than the remaining gate electrodes. The heat sensing element has a rectangular shape and is disposed between the two shorter drains and the two shorter gate electrodes to accurately detect the temperature of the power element.
1. A semiconductor device, comprising:
a power element formed on a first semiconductor layer and having a plurality of lateral MOS transistors arranged at equal pitches in a first direction, the plurality of lateral MOS transistors having drains that extend in a second direction perpendicular to the first direction, two of the drains being shortened drains that have a width shorter in the second direction than that of the remaining drains of the plurality of lateral MOS transistors, and the plurality of lateral MOS transistors having gate electrodes that extend in the second direction, two of the gate electrodes adjacent to the two shortened drains being shortened gate electrodes that have a width shorter in the second direction than that of the remaining gate electrodes of the plurality of lateral MOS transistors; and
a rectangular heat sensing element made from a second semiconductor layer isolated from the first semiconductor layer by an insulating film, the rectangular heat sensing element being configured to detect a temperature of the power element and being arranged between the two shortened drains and between the two shortened gate electrodes of the plurality of lateral MOS transistors so that at least two sides of the rectangular heat sensing element are adjacent to the power element in a plan view.
2. A semiconductor device according to claim 1 ;
wherein the plurality of lateral MOS transistors have sources that extend in the second direction, and two of the sources adjacent to the two shortened gate electrodes are shortened sources that have a width shorter in the second direction than that of the remaining sources of the plurality of lateral MOS transistors, and
wherein the rectangular heat sensing element is arranged between the two shortened sources of the plurality of lateral MOS transistors.
3. A semiconductor device according to claim 1 ;
wherein the plurality of lateral MOS transistors have sources that extend in the second direction, and at least one of the sources is a thin source from which a portion opposing the rectangular heat sensing element is removed to form a narrow portion of the thin source.
4. A semiconductor device according to claim 1 ;
wherein the plurality of lateral MOS transistors have sources that extend in the second direction, at least one of the sources has a portion whose conductivity type is opposite to that of the remaining sources, and the portion opposes the rectangular heat sensing element.