Semiconductor devices including a passive material between memory cells and conductive access lines, and related electronic devices
A semiconductor device includes first conductive lines extending in a first direction, second conductive lines extending in a second direction, memory cells disposed between the first conductive lines and the second conductive lines, each memory cell disposed at an intersection of a first conductive line and a second conductive line, and a passive material between the memory cells and at least one of the first conductive lines and the second conductive lines. Related semiconductor devices and electronic devices are disclosed.
1. A semiconductor device, comprising:
at least one memory cell comprising:
a first electrode;
a memory material adjacent to the first electrode;
a selector material; and
a second electrode between the memory material and the selector material;
a conductive access line on a first side of the at least one memory cell;
another conductive access line on a second, opposite side of the at least one memory cell;
at least one passive material between the at least one memory cell and the conductive access line, the conductive access line contacting the at least one passive material on a side of the at least one passive material opposite the at least one memory cell, wherein the at least one passive material exhibits electrically conductive properties responsive to exposure to a voltage greater than a threshold voltage and electrically insulative properties when exposed to a voltage less than a threshold voltage, the at least one passive material coextensive with the conductive access line and extending between the at least one memory cell and an adjacent memory cell, the at least one passive material spaced from the memory material by the first electrode; and
a semimetal material adjacent to the at least one passive material, the semimetal material coextensive with the at least one passive material and comprising a material selected from the group consisting of a metal silicide and a metal silicon nitride.
2. The semiconductor device of claim 1 , wherein the at least one passive material comprises aluminum oxide.
3. The semiconductor device of claim 1 , wherein the at least one passive material comprises a metal nitride.
4. The semiconductor device of claim 1 , wherein the semimetal material comprises tungsten silicon nitride directly contacting the at least one passive material.
5. The semiconductor device of claim 1 , wherein the at least one passive material comprises aluminum oxide and wherein the at least one memory cell further comprises aluminum oxide.
6. The semiconductor device of claim 1 , wherein the at least one passive material is selected from the group consisting of aluminum oxide, tungsten silicon nitride, titanium silicon nitride, a metal nitride, silicon nitride, and a metal silicide.
7. The semiconductor device of claim 1 , further comprising another passive material between the at least one memory cell and the another conductive access line, the another passive material extending between the at least one memory cell and the adjacent memory cell.
8. The semiconductor device of claim 1 , wherein a thickness of the at least one passive material is between about 0.5 nm and about 10 nm.
9. The semiconductor device of claim 1 , wherein the at least one passive material directly contacts the at least one memory cell.
10. The semiconductor device of claim 1 , wherein the semimetal material is between and contacting the at least one passive material and the conductive access line, the semimetal material spacing the at least one passive material from the conductive access line.
11. The semiconductor device of claim 10 , wherein the semimetal material comprises tungsten silicon nitride (WSiN).
12. The semiconductor device of claim 10 , wherein the semimetal material includes the same metal as the conductive access line.
13. The semiconductor device of claim 1 , wherein the semimetal material is between the at least one passive material and the at least one memory cell.
14. The semiconductor device of claim 13 , wherein the semimetal material has a thickness greater than a thickness of the at least one passive material.
15. An electronic device, comprising: a processor; a memory array operably coupled to the processor, the memory array comprising memory cells, each memory cell comprising: a select device between a first electrode and a second electrode; and a memory material between the second electrode and a third electrode; a first set of conductive lines on a side of the memory cells; a second set of conductive lines on an opposite side of the memory cells; a passive material comprising aluminum oxide between the memory cells and the first set of conductive lines, the passive material contiguous with the first set of conductive lines and extending between adjacent memory cells; and a power supply in operable communication with the processor.
16. The electronic device of claim 15 , wherein the passive material directly contacts the first set of conductive lines, the passive material spaced from the select device and the memory material of each memory cell at least by the first electrode.