IP Library Granted Patent US 10,647,578
Granted Patent B2
US 10,647,578 · App. 15/661,412 · Granted May 12, 2020

N—H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications

Inventors: Antonio Sanchez (Tsukuba, JP); Gennadiy Itov (Flemington, NJ); Manish Khandelwal (Somerset, NJ); Cole Ritter (Easton, PA); Peng Zhang (Montvale, NJ); Jean-Marc Girard (Versailles, FR); Zhiwen Wan (Plano, TX); Glenn Kuchenbeiser (Newark, DE); David Orban (Hampton, NJ); Sean Kerrigan (Princeton, NJ); Reno Pesaresi (Easton, PA); Matthew Damien Stephens (Easton, PA); Yang Wang (Glen Mills, PA); Guillaume Husson (Wilmington, DE)
Assignees: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude; American Air Liquide, Inc.
C01B21/087B05D1/005B05D1/02B05D1/18C01B21/0823C04B35/14C04B35/5603C04B35/571C04B35/589C04B35/597C08G77/62C09D1/00C09D183/16C23C16/24C23C16/45553C23C18/122C23C18/1275C23C18/1291C23C18/1295C04B2235/483H01L21/0214H01L21/02222
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Quick Facts
Patent No.
US 10,647,578
App. No.
15/661,412
Granted
May 12, 2020
Kind
B2
Abstract

Solid or liquid N—H free, C-free, and Si-rich perhydropolysilazane compositions comprising units having the following formula [—N(SiH 3 ) x (SiH 2 —) y ], wherein x=0, 1, or 2 and y=0, 1, or 2 when x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 when x+y=3 are disclosed. Also disclosed are synthesis methods and applications for the same.

Claims (3)

1. A method of synthesizing a N—H free, C-free, and Si-rich perhydropolysilazane composition, the method comprising mixing trisilylamine and a catalyst to produce the N—H free, C-free, and Si-rich perhydropolysilazane composition having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton, wherein the catalyst is selected from the group consisting of B(C 6 F 5 ) 3 , BPh 3 , PdCl 2 , Co 2 (CO) 8 , Ru 3 (CO) 12 , and Zeolite Y (H) Si:Al.

2. A method of synthesizing a N—H free, C-free, and Si-rich perhydropolysilazane composition, the method comprising mixing trisilylamine and a catalyst to produce the N—H free, C-free, and Si-rich perhydropolysilazane composition having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton, further comprising mixing trisilylamine and the catalyst at room temperature and atmospheric pressure.

3. A method of synthesizing a N—H free, C-free, and Si-rich perhydropolysilazane composition, the method comprising mixing trisilylamine and a catalyst to produce the N—H free, C-free, and Si-rich perhydropolysilazane composition having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton, wherein the catalyst is B(C 6 F 5 ) 3 , further comprising adding a quenching agent when a N—H free, C-free, and Si-rich perhydropolysilazane composition obtains the desired molecular weight.

Assignments (9)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 31, 2020
From: AIR LIQUIDE ADVANCED MATERIALS, INC.; AIR LIQUIDE ADVANCED MATERIALS, LLC
To: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
Reel/Frame 052271/0039 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 31, 2020
From: AIR LIQUIDE ELECTRONICS U.S. LP
To: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
Reel/Frame 052271/0104 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2017
From: WAN, ZHIWEN
To: AIR LIQUIDE ELECTRONICS U.S. LP
Reel/Frame 044442/0994 →
EMPLOYMENT AGREEMENT Recorded Nov 14, 2017
From: KHANDELWAL, MANISH
To: VOLTAIX, LLC
Reel/Frame 044751/0227 →
CHANGE OF NAME Recorded Nov 14, 2017
From: VOLTAIX, LLC
To: AIR LIQUIDE ADVANCED MATERIALS LLC
Reel/Frame 044751/0262 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2017
From: KUCHENBEISER, GLENN; WANG, YANG; HUSSON, GUILLAUME
To: AMERICAN AIR LIQUIDE, INC.
Reel/Frame 044121/0043 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2017
From: KERRIGAN, SEAN
To: AIR LIQUIDE ADVANCED MATERIALS, INC.
Reel/Frame 044121/0177 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2017
From: SANCHEZ, ANTONIO; ITOV, GENNADIY; RITTER, COLE; ZHANG, PENG; ORBAN, DAVID; PESARESI, RENO; STEPHENS, MATTHEW DAMIEN
To: AIR LIQUIDE ADVANCED MATERIALS LLC
Reel/Frame 044121/0374 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 14, 2017
From: GIRARD, JEAN-MARC
To: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
Reel/Frame 044121/0574 →
Continuity (2)
Provisional Application 62432592 · Dec 11, 2016
Related Publication 20180072571A1 · Mar 15, 2018