IP Library Granted Patent US 11,187,838
Granted Patent B2
US 11,187,838 · App. 15/665,911 · Granted Nov 30, 2021

Spectral filter for high-power fiber illumination sources

Inventors: Andrew V. Hill (Berkley, CA); Ohad Bachar (Timrat, IL); Avi Abramov (Haifa, IL); Amnon Manassen (Haifa, IL)
Assignee: KLA Corporation
G02B5/26G01J1/0451G01J1/0488G01J1/08G01J3/024G01J3/0208G01J3/0218G02B5/208G02B6/0008G02B6/29361G01J2003/1213
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Quick Facts
Patent No.
US 11,187,838
App. No.
15/665,911
Granted
Nov 30, 2021
Kind
B2
Abstract

A spectral filter includes a curved filtering element including a concave surface forming a portion of a sphere. The concave surface may be positioned to receive light diverging from an output face of an optical fiber located at a first location proximate to a center of the sphere corresponding to the concave surface. The concave surface may transmit a first portion of a spectrum of the light. The concave surface may further reflect and focus a second portion of the spectrum to a second location proximate to the center of the sphere. The spectral filter may further include a collector to direct the second portion of the spectrum away from the output face of the optical fiber.

Claims (61)

1. A spectral filter comprising:

a curved filtering element including a concave surface forming a portion of a sphere, the concave surface formed as a polished optical surface, the concave surface positioned to receive light diverging from an output face of an optical fiber positioned at a first location proximate to a center of the sphere, the concave surface further including a wavelength-selective coating configured to transmit a first portion of a spectrum of the light and reflect a second portion of the spectrum of the light, wherein the first and second portions of the spectrum provide a broadband spectral range separated by a selected cutoff wavelength such that the wavelength-selective coating is one of a high-pass or a low-pass spectral filter with respect to the selected cutoff wavelength, the concave surface further configured to reflect and focus the second portion of the spectrum to a second location proximate to the center of the sphere; and

a collector configured to direct the second portion of the spectrum away from the output face of the optical fiber.

2. The spectral filter of claim 1 , wherein the collector comprises:

an additional optical fiber with an input face at the second location to receive the second portion of the spectrum.

3. The spectral filter of claim 1 , wherein the collector comprises:

a mirror located at the second location proximate to the center of the sphere and oriented to direct the second portion of the spectrum away from the output face of the optical fiber.

4. The spectral filter of claim 1 , wherein the curved filtering element further includes an exit surface positioned to receive the fiarst portion of the spectrum from the concave surface, wherein the first portion of the spectrum exits the curved filtering element through the exit surface.

5. The spectral filter of claim 4 , wherein the exit surface is shaped to mitigate aberration induced by the concave surface.

6. The spectral filter of claim 1 , wherein the curved filtering element further includes an input surface coupled to the output face of the optical fiber to receive the light diverging from the output face of the optical fiber, wherein the first portion of the spectrum exits the curved filtering element through the concave surface.

7. The spectral filter of claim 6 , wherein the curved filtering element further includes an exit surface positioned at the second location, wherein the second portion of the spectrum exits the curved filtering element through the exit surface.

8. The spectral filter of claim 7 , wherein the collector comprises:

an additional optical fiber with an input face coupled to the exit surface to receive the second portion of the spectrum.

9. The spectral filter of claim 1 , further comprising:

a collimating optical element positioned to collimate the first portion of the spectrum transmitted through the concave surface.

10. The spectral filter of claim 1 , further comprising:

a collimating optical element positioned to collimate the second portion of the spectrum directed away from the output face of the optical fiber by the collector.

11. The spectral filter of claim 1 , further comprising:

a beam dump positioned to receive one of the first portion of the spectrum transmitted through the concave surface or the second portion of the spectrum directed away from the output face of the optical fiber by the collector.

12. The spectral filter of claim 1 , wherein the curved surface includes a high-pass reflective filter with a selected cutoff wavelength, wherein the first portion of the spectrum includes wavelengths lower than the selected cutoff wavelength, wherein the second portion of the spectrum includes wavelengths higher than the selected cutoff wavelength.

13. The spectral filter of claim 12 , wherein the selected cutoff wavelength is in the infrared spectral region.

14. The spectral filter of claim 1 , wherein the curved surface comprises:

a low-pass reflective filter with a selected cutoff wavelength, wherein the first portion of the spectrum includes wavelengths higher than the selected cutoff wavelength, wherein the second portion of the spectrum includes wavelengths lower than the selected cutoff wavelength.

15. The spectral filter of claim 14 , wherein the selected cutoff wavelength is in the infrared spectral region.

16. The spectral filter of claim 1 , wherein the wavelength-selective coating comprises:

one or more dielectric layers.

17. The spectral filter of claim 1 , wherein the wavelength-selective coating comprises:

one or more metallic layers.

18. A filtered fiber illumination source comprising:

a fiber illumination source configured to provide broadband illumination diverging from an output face of an optical fiber;

a curved filtering element including a concave surface forming a portion of a sphere, the concave surface formed as a polished optical surface, the concave surface positioned to receive the broadband illumination diverging from the output face of the optical fiber, the output face of the optical fiber positioned at a first location proximate to a center of the sphere, the concave surface further including a wavelength-selective coating configured to transmit a first portion of a spectrum of the broadband illumination and reflect a second portion of the spectrum of the broadband illumination, wherein the first and second portions of the spectrum provide a broadband spectral range separated by a selected cutoff wavelength such that the wavelength-selective coating is one of a high-pass or a low-pass spectral filter with respect to the selected cutoff wavelength, the concave surface further configured to reflect and focus the second portion of the spectrum to a second location proximate to the center of the sphere; and

a collector configured to direct the second portion of the spectrum away from the output face of the optical fiber.

19. The filtered fiber illumination source of claim 18 , wherein the fiber illumination source comprises:

a supercontinuum laser source.

20. The filtered fiber illumination source of claim 18 , wherein the collector comprises:

an additional optical fiber with an input face at the second location to receive the second portion of the spectrum.

21. The filtered fiber illumination source of claim 18 , wherein the collector comprises:

a mirror located at the second location proximate to the center of the sphere and oriented to direct the second portion of the spectrum away from the output face of the optical fiber.

22. The filtered fiber illumination source of claim 18 , wherein the curved filtering element further includes an exit surface positioned to receive the first portion of the spectrum from the concave surface, wherein the first portion of the spectrum exits the curved filtering element through the exit surface.

23. The filtered fiber illumination source of claim 18 , wherein the curved filtering element further includes an input surface coupled to the output face of the optical fiber to receive the light diverging from the output face of the optical fiber.

24. The filtered fiber illumination source of claim 23 , wherein the curved filtering element further includes an exit surface positioned at the second location, wherein the second portion of the spectrum exits the curved filtering element through the exit surface.

25. The filtered fiber illumination source of claim 24 , wherein the collector comprises:

an additional optical fiber with an input face coupled to the exit surface to receive the second portion of the spectrum.

26. The filtered fiber illumination source of claim 18 , further comprising:

a collimating optical element positioned to collimate the first portion of the spectrum transmitted through the concave surface.

27. The filtered fiber illumination source of claim 18 , further comprising:

a collimating optical element positioned to collimate the second portion of the spectrum directed away from the output face of the optical fiber by the collector.

28. The filtered fiber illumination source of claim 18 , further comprising:

a beam dump positioned to receive one of the first portion of the spectrum transmitted through the concave surface or the second portion of the spectrum directed away from the output face of the optical fiber by the collector.

29. The filtered fiber illumination source of claim 18 , wherein the wavelength-selective coating is a high-pass reflective filter with the selected cutoff wavelength.

30. The filtered fiber illumination source of claim 29 , wherein the selected cutoff wavelength is in the infrared spectral region.

31. The filtered fiber illumination source of claim 18 , wherein the curved surface is a low-pass reflective filter with the selected cutoff wavelength.

32. The filtered fiber illumination source of claim 31 , wherein the selected cutoff wavelength is in the infrared spectral region.

33. The filtered fiber illumination source of claim 18 , wherein the wavelength-selective coating comprises:

at least one of one or more dielectric layers or one or more metallic layers.

34. A method for filtering illumination from an optical fiber comprising:

receiving illumination from an output face of an optical fiber with a curved filtering element including a concave surface forming a portion of a sphere, the concave surface formed as a polished optical surface, the concave surface positioned to receive light diverging from an output face of an optical fiber positioned at a first location proximate to a center of the sphere;

transmitting, with a wavelength-selective coating on the concave surface, a first portion of a spectrum of the illumination;

reflecting, with the wavelength-selective coating on the concave surface, a second portion of the spectrum, wherein the first and second portions of the spectrum provide a broadband spectral range separated by a selected cutoff wavelength such that the wavelength-selective coating is one of a high-pass or a low-pass spectral filter with respect to the selected cutoff wavelength;

focusing, with the concave surface, the second portion of the spectrum to a second location proximate to the center of the sphere; and

directing, with a collector, the second portion of the spectrum away from the output face of the optical fiber.

Assignments (2)
CHANGE OF NAME Recorded Oct 21, 2021
From: KLA-TENCOR CORPORATION
To: KLA CORPORATION
Reel/Frame 057881/0643 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 7, 2018
From: HILL, ANDREW V.; BACHAR, OHAD; ABRAMOV, AVI; MANASSEN, AMNON
To: KLA-TENCOR CORPORATION
Reel/Frame 046014/0886 →
Continuity (2)
Provisional Application 62539543 · Jul 31, 2017
Related Publication 20190033501A1 · Jan 31, 2019