IP Library Granted Patent US 10,355,002
Granted Patent B2
US 10,355,002 · App. 15/667,159 · Granted Jul 16, 2019

Memory cells, methods of forming an array of two transistor-one capacitor memory cells, and methods used in fabricating integrated circuitry

Inventor: Scott E. Sills (Boise, ID)
Assignee: Micron Technology, Inc.
H01L27/10844H01L21/76897H01L28/60H01L28/90H01L28/91H01L27/11507
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,355,002
App. No.
15/667,159
Granted
Jul 16, 2019
Kind
B2
Abstract

A memory cell comprises first and second transistors laterally displaced relative one another. A capacitor is above the first and second transistors. The capacitor comprises a container-shape conductive first capacitor node electrically coupled with a first current node of the first transistor, a conductive second capacitor node electrically coupled with a first current node of the second transistor, and a capacitor dielectric material between the first capacitor node and the second capacitor node. The capacitor dielectric material extends across a top of the container-shape first capacitor node. Additional embodiments and aspects, including method, are disclosed.

Claims (25)

1. A memory cell comprising:

first and second transistors laterally displaced relative one another; and

a capacitor above the first and second transistors; the capacitor comprising a container-shape conductive first capacitor node electrically coupled with a first current node of the first transistor, a conductive second capacitor node electrically coupled with a first current node of the second transistor, and a capacitor dielectric material between the first capacitor node and the second capacitor node; the capacitor dielectric material extending across a top of the container-shape first capacitor node.

2. The memory cell of claim 1 wherein the first and second transistors are each elevationally-extending.

3. The memory cell of claim 2 wherein the first and second transistors are each vertical or within 10° of vertical.

4. The memory cell of claim 1 wherein the capacitor dielectric material is directly against the top of the container-shape first capacitor node.

5. The memory cell of claim 1 wherein the second capacitor node is directly against a top of the capacitor dielectric material.

6. The memory cell of claim 1 wherein the first capacitor node is directly above the first current node of the first transistor.

7. The memory cell of claim 1 wherein the second capacitor node is directly above the first current node of the second transistor.

8. The memory cell of claim 7 wherein the second capacitor node is directly above the first current node of the first transistor.

9. The memory cell of claim 1 wherein the first capacitor node is directly electrically coupled with the first current node of the first transistor and the second capacitor node is directly electrically coupled with the first current node of the second transistor.

10. The memory cell of claim 1 wherein the first and second transistors are in a common horizontal plane relative one another.

11. The memory cell of claim 1 wherein the container-shape first capacitor node and the first transistor are longitudinally coaxial.

12. A memory cell comprising:

first and second transistors laterally displaced relative one another; and

a capacitor above the first and second transistors; the capacitor comprising a conductive first capacitor node electrically coupled with a first current node of the first transistor, a conductive second capacitor node electrically coupled with a first current node of the second transistor, and a capacitor dielectric material between the first and second capacitor nodes; the second capacitor node being directly against a top of the capacitor dielectric material that is between the first and second capacitor nodes.

13. The memory cell of claim 12 wherein the first capacitor node comprises a container-shape.

14. A two transistor-one capacitor memory cell comprising:

first and second transistors laterally displaced relative one another; and

a capacitor above the first and second transistors; the capacitor comprising a conductive first capacitor node directly above and electrically coupled with a first current node of the first transistor, a conductive second capacitor node directly above the first and second transistors and electrically coupled with a first current node of the second transistor, and a capacitor dielectric material between the first and second capacitor nodes; the second capacitor node comprising an elevationally-extending conductive pillar directly above the first current node of the second transistor, the conductive pillar having an elevationally outer portion that is of hourglass shape in horizontal cross-section.

15. The memory cell of claim 14 wherein the pillar and the second transistor are longitudinally coaxial.

16. The memory cell of claim 14 wherein laterally-extending end surfaces of the hourglass shape are concave.

17. The memory cell of claim 14 wherein longitudinally-extending side surfaces of the hourglass shape are circularly concave between longitudinal ends of the hourglass shape.

18. The memory cell of claim 14 wherein the memory cell occupies a maximum horizontal area of no more than 5.2F 2 , where “F” is minimum horizontal width of a smaller, if any, of the top of an elevationally outermost surface the first current node of the first and second transistors.

19. The memory cell of claim 18 wherein the maximum horizontal area is less than 5.2F 2 .

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050709/0838 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0333 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 044348/0253 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 044653/0333 →
Continuity (2)
Provisional Application 62381737 · Aug 31, 2016
Related Publication 20180061840A1 · Mar 1, 2018
Cited By (2)
US 12,513,891 US 12,575,083