IP Library Granted Patent US 10,014,115
Granted Patent B2
US 10,014,115 · App. 15/675,977 · Granted Jul 3, 2018

Apparatuses, multi-chip modules and capacitive chips

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Quick Facts
Patent No.
US 10,014,115
App. No.
15/675,977
Granted
Jul 3, 2018
Kind
B2
Abstract

Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.

Claims (54)

1. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitor stack comprising at least about 10 total layers;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

wherein the capacitive units on the capacitive chip together may have total capacitance within a range of from about 10 microfarads to about 200 microfarads under voltage within a range of from about 1 volt to about 5 volts.

2. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitor stack comprising at least about 10 total layers;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

comprising at least about 1 capacitive unit per square millimeter.

3. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitor stack comprising at least about 10 total layers;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

comprising at least about 4 capacitive units per square millimeter.

4. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitor stack comprising at least about 10 total layers;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

wherein all of the capacitive units are substantially identical to one another in capacitance.

5. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitor stack comprising at least about 10 total layers;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

wherein at least one of the capacitive units has a substantially different capacitance than another of the capacitive units.

6. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

wherein the capacitor stack comprises at least about 30 total layers.

7. The capacitive chip of claim 6 wherein the capacitor stack comprises at least about 50 total layers.

8. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

wherein the capacitor stack comprises from at least about 10 total layers to at least about 100 total layers.

9. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitor stack comprising at least about 10 total layers;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

wherein the electrode layers are all a same composition as one another.

10. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitor stack comprising at least about 10 total layers;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

wherein the dielectric layers are all a same composition as one another.

11. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitor stack comprising at least about 10 total layers;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

wherein the undulating surface extends into a semiconductor substrate.

12. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:

alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;

the capacitor stack comprising at least about 10 total layers;

the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and

wherein the undulating surface is along glass.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050709/0838 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0333 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 044348/0253 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 044653/0333 →