Apparatuses, multi-chip modules and capacitive chips
View Patent ↗Some embodiments include a capacitive chip having a plurality of capacitive units. The individual capacitive units include alternating electrode layers and dielectric layers in a capacitor stack. The capacitor stack extends across an undulating topography. The undulating topography has peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns. The capacitor stack includes at least about 10 total layers. Some embodiments include apparatuses and multi-chip modules having capacitor chips.
1. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitor stack comprising at least about 10 total layers;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
wherein the capacitive units on the capacitive chip together may have total capacitance within a range of from about 10 microfarads to about 200 microfarads under voltage within a range of from about 1 volt to about 5 volts.
2. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitor stack comprising at least about 10 total layers;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
comprising at least about 1 capacitive unit per square millimeter.
3. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitor stack comprising at least about 10 total layers;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
comprising at least about 4 capacitive units per square millimeter.
4. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitor stack comprising at least about 10 total layers;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
wherein all of the capacitive units are substantially identical to one another in capacitance.
5. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitor stack comprising at least about 10 total layers;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
wherein at least one of the capacitive units has a substantially different capacitance than another of the capacitive units.
6. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
wherein the capacitor stack comprises at least about 30 total layers.
7. The capacitive chip of claim 6 wherein the capacitor stack comprises at least about 50 total layers.
8. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
wherein the capacitor stack comprises from at least about 10 total layers to at least about 100 total layers.
9. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitor stack comprising at least about 10 total layers;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
wherein the electrode layers are all a same composition as one another.
10. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitor stack comprising at least about 10 total layers;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
wherein the dielectric layers are all a same composition as one another.
11. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitor stack comprising at least about 10 total layers;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
wherein the undulating surface extends into a semiconductor substrate.
12. A capacitive chip comprising a plurality of capacitive units, the individual capacitive units comprising:
alternating electrode layers and dielectric layers in a capacitor stack; the capacitor stack extending across an undulating topography; the undulating topography comprising peaks and valleys with the peaks being elevationally offset relative to the valleys by a distance within a range of from about 30 microns to about 100 microns;
the capacitor stack comprising at least about 10 total layers;
the capacitive chip having capacitive density within a range of from about 1 μF/mm 2 to about 20 μF/mm 2 ; and
wherein the undulating surface is along glass.