MEMS resonator
Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.
1. A method of fabricating a microelectromechanical system (MEMS) resonant structure, the method comprising:
forming a silicon-on-insulator structure having an insulating material layer disposed between a first degenerately-doped silicon layer and a substrate layer;
epitaxially growing an aluminum nitride material layer on the first degenerately-doped silicon layer;
forming a second degenerately-doped silicon layer on the aluminum nitride material layer such that the aluminum nitride material layer is sandwiched between the first and second degenerately-doped silicon layers; and
removing at least a portion of the insulating material layer from beneath the first degenerately-doped silicon layer;
wherein the first degenerately-doped silicon layer is to serve as a first electrode for the MEMS resonant structure and the second degenerately-doped silicon layer is to serve as a second electrode for the MEMS resonant structure, each in absence of a metal electrode layer.
2. The method of claim 1 wherein forming the silicon-on-insulator structure having the insulating material layer disposed between the first degenerately-doped silicon layer and the substrate layer comprises separating the first degenerately-doped silicon layer from a degenerately-doped silicon ingot and disposing the first degenerately-doped silicon layer on the insulating material layer.
3. The method of claim 1 wherein forming the silicon-on-insulator structure having the insulating material layer disposed between the first degenerately-doped silicon layer and the substrate layer comprises epitaxially forming the first degenerately-doped silicon layer on the insulating material layer within a chamber populated by vapor phase silicon and a vapor phase dopant.
4. The method of claim 1 wherein forming the silicon-on-insulator structure having the insulating material layer disposed between the first degenerately-doped silicon layer and the substrate layer comprises forming the first degenerately-doped silicon layer by thermally diffusing a solid-phase dopant into a non-degenerately-doped silicon layer.
5. The method of claim 1 wherein forming the silicon-on-insulator structure having the insulating material layer disposed between the first degenerately-doped silicon layer and the substrate layer comprises forming the first degenerately-doped silicon layer by diffusing at least one of a vapor-phase dopant or a liquid-phase dopant into a non-degenerately-doped silicon layer.
6. The method of claim 1 wherein forming the silicon-on-insulator structure having the insulating material layer disposed between the first degenerately-doped silicon layer and the substrate layer comprises disposing the insulating material layer between the substrate layer and a single-crystal silicon layer having a dopant concentration of at least 10 20 dopant atoms per cubic centimeter.
7. The method of claim 1 wherein the first degenerately-doped silicon layer, aluminum nitride material layer and second degenerately-doped silicon layer collectively constitute a material stack, the method further comprising etching the material stack to distinguish a moveable portion of the MEMS resonant structure from a field area.
8. The method of claim 7 wherein removing at least the portion of the insulating material layer from beneath the first degenerately-doped silicon layer comprises removing the portion of the insulating material layer after etching the material stack.
9. The method of claim 1 wherein the substrate layer comprises a single-crystal silicon layer.
10. The method of claim 1 wherein forming the silicon-on-insulator structure having the insulating material layer disposed between the first degenerately-doped silicon layer and the substrate layer comprises forming the first degenerately-doped silicon layer by ion-implantation of dopant into a non-degenerately-doped silicon layer.
11. The method of claim 1 wherein the first degenerately-doped silicon layer comprises a degenerately-doped single-crystal silicon layer.
12. The method of claim 11 wherein the second degenerately-doped silicon layer comprises a degenerately-doped polycrystalline silicon layer.
13. The method of claim 12 wherein the degenerately-doped polycrystalline silicon layer comprises in-situ-doped polycrystalline silicon.
14. The method of claim 11 wherein the method further comprises forming the MEMS resonant structure to have a predetermined angular deviation between a crystallographic orientation of the degenerately-doped single-crystal silicon layer and a resonance mode orientation of the MEMS resonant structure.
15. The method of claim 11 wherein the method further comprises forming at least one of the degenerately-doped single-crystal silicon layer and the aluminum nitride material layer, such that the degenerately-doped single-crystal silicon layer and the aluminum nitride material layer have respective, reciprocal-polarity parabolic temperature coefficients of frequency.
16. The method of claim 11 wherein the method further comprises forming the degenerately-doped single-crystal silicon layer by doping single-crystal silicon with at least one of phosphorus, arsenic, antimony, bismuth and lithium.
17. The method of claim 11 wherein the method further comprises forming the MEMS resonant structure so as to be encapsulated within a hermetically sealed chamber.
18. A method of fabricating a microelectromechanical system (MEMS) resonant structure, the method comprising:
forming a silicon-on-insulator structure having an insulating material layer disposed between a first degenerately-doped silicon layer and a substrate layer;
epitaxially growing an aluminum nitride material layer on the first degenerately-doped silicon layer;
forming a second degenerately-doped silicon layer on the aluminum nitride material layer such that the aluminum nitride material layer is sandwiched between the first and second degenerately-doped silicon layers; and
removing at least a portion of the insulating material layer from beneath the first degenerately-doped silicon layer;
wherein the first degenerately-doped silicon layer is to serve as a first electrode for the MEMS resonant structure and the second degenerately-doped silicon layer is to serve as a second electrode for the MEMS resonant structure, each in absence of a metal electrode layer; and
wherein the method further comprises forming the MEMS resonant structure such that the aluminum nitride material layer and one of the first or second degenerately-doped silicon layers, respectively, have reciprocal-polarity parabolic temperature coefficients of frequency.
19. The method of claim 18 wherein the method further comprises forming the MEMS resonant structure to have a predetermined angular deviation between a crystallographic orientation of one of first or second the degenerately-doped silicon layers and a resonance mode orientation of the MEMS resonant structure.
20. A method of fabricating a microelectromechanical system (MEMS) resonant structure, the method comprising:
forming a silicon-on-insulator structure having an insulating material layer disposed between a first degenerately-doped silicon layer and a substrate layer, the first degenerately-doped silicon layer comprising a first one of polysilicon and single-crystal silicon;
epitaxially growing an aluminum nitride material layer on the first degenerately-doped silicon layer;
forming a second degenerately-doped silicon layer on the aluminum nitride material layer such that the aluminum nitride material layer is sandwiched between the first and second degenerately-doped silicon layers, the second degenerately-doped silicon layer comprising a second one of polysilicon and single-crystal silicon; and
removing at least a portion of the insulating material layer from beneath the first degenerately-doped silicon layer;
wherein the first degenerately-doped silicon layer is to serve as a first electrode for the MEMS resonant structure and the second degenerately-doped silicon layer is to serve as a second electrode for the MEMS resonant structure, each in absence of a metal electrode layer; and
wherein the method further comprises forming the MEMS resonant structure such that at least one of the first degenerately-doped silicon layer and the second degenerately-doped silicon layer comprises single-crystal silicon, and such that the single-crystal silicon has a predetermined angular deviation between a crystallographic orientation of the single-crystal silicon and a resonance mode orientation of the MEMS resonant structure.
21. The method of claim 20 wherein the method further comprises forming the MEMS resonant structure such that the single-crystal silicon and the aluminum nitride material layer, respectively, have reciprocal-polarity parabolic temperature coefficients of frequency.
22. The method of claim 20 wherein the method further comprises forming at least one predetermined layer of the MEMS resonant structure so as to have a non-uniform dopant profile.