Semiconductor device and method for fabricating the same

1. A method for fabricating semiconductor device, comprising:

forming a gate structure on a substrate;

forming an interlayer dielectric (ILD) layer around the gate structure;

removing the gate structure to form a first recess;

forming ferroelectric (FE) layer in the first recess;

forming a compressive layer on the FE layer;

performing a thermal treatment process directly on the compressive layer;

removing the compressive layer;

forming a work function metal layer in the recess;

forming a low resistance metal layer on the work function metal layer;

performing a planarizing process to form a metal gate;

removing part of the metal gate to form a second recess; and

forming a polysilicon layer in the second recess and on the ILD layer.

2. The method of claim 1 , further comprising:

forming a fin-shaped structure on the substrate; and

forming the gate structure on the fin-shaped structure, wherein the fin-shaped structure comprises silicon germanium.

3. The method of claim 1 , further comprising:

removing part of the polysilicon layer to form a third recess; and

forming a hard mask on the polysilicon layer.

4. The method of claim 1 , wherein the polysilicon layer comprises a n-type polysilicon layer.

5. The method of claim 1 , wherein the polysilicon layer is U-shaped.

6. The method of claim 1 , further comprising:

forming a high-k dielectric layer in the first recess; and

forming a bottom barrier metal (BBM) layer on the high-k dielectric layer before forming the FE layer.

7. The method of claim 1 , wherein the FE layer comprises HfZrO 2 .

8. The method of claim 1 , wherein the compressive layer comprises a compressive TiN layer.