Ceramic ring with a ladder structure
A ceramic ring for supporting a wafer, comprising: a body; and an annular recess provided in the center of the body, the annular recess having a bottom surface and a buffer portion extending upwards from the bottom surface to the surface of the body. The ceramic ring can ensure reliability in positioning the wafer, and can prevent the edge side of the wafer from generating particles by contacting the ceramic ring.
1. A ceramic ring for supporting a wafer, comprising:
a body; and
an annular recess provided in a center of the body, the annular recess having a bottom surface and a buffer portion extending upward from the bottom surface to a surface of the body;
wherein the buffer portion of the ceramic ring has a first slope surface and a second slope surface, the bottom surface connects to the first slope surface, the first slope surface connects to the second slope surface, the second slope surface connects to the surface of the body, the first slope surface and an extending plane of the bottom surface define a first slope surface angle, and an extending plane of the second slope surface and the extending plane of the bottom surface define a second slope surface angle;
wherein the wafer has a bottom side and an edge side, a slope side is disposed between the bottom side and the edge side, a junction of the slope side and the edge side forms an arc surface, and the slope side and an extending plane of the bottom side define a wafer slope side angle;
wherein the first slope surface angle is smaller than the wafer slope side angle, and the wafer slope side angle is smaller than the second slope surface angle;
wherein the first slope surface angle is smaller than the second slope surface angle;
wherein the first slope surface and the second slope surface are configured to allow the wafer to slide therebetween; and
wherein the edge side of the wafer does not contact the ceramic ring while the wafer is sliding between the first slope surface and the second slope surface.
2. The ceramic ring of claim 1 , wherein a junction of the bottom surface of the ceramic ring and the first slope surface thereof forms an arc surface; a junction of the first slope surface of the ceramic ring and the second slope surface thereof forms an arc surface; and a junction of the second slope surface of the ceramic ring and the surface of the body forms an arc surface.