Manufacturing method for liquid crystal display device
A LCD device having a large pixel holding capacitance includes opposedly facing first and second substrates, and liquid crystal between them. The first substrate includes a video signal line, a pixel electrode, a thin film transistor having a first electrode connected to the video signal line and a second electrode connected to the pixel electrode, a first silicon nitride film formed above the second electrode, an organic insulation film above the first silicon nitride film, a capacitance electrode above the organic insulation film, and a second silicon nitride film above the capacitance electrode and below the pixel electrode. A contact hole etched in both the first and second silicon nitride films connects the second electrode and the pixel electrode to each other. A holding capacitance is formed by the pixel electrode, the second silicon nitride film and the capacitance electrode.
1. A display device comprising:
a first transparent insulation substrate;
an organic insulation film having a first hole;
a first inorganic insulation film having a second hole located inside of the first hole;
a source electrode connected to a poly-silicon layer between the first transparent insulation substrate and the organic insulation film;
a counter electrode between the organic insulation film and the first inorganic insulation film having an opening portion; and
a pixel electrode connected to the source electrode via the first hole, the second hole and the opening portion;
wherein
a first part of the first inorganic insulation film is formed along a side surface of the first hole,
a second part of the first inorganic insulation film is extending from the first part toward a center of the first hole.
2. The display device according to claim 1 , wherein the pixel electrode is directly contacts the first part and the second part in the second hole.
3. The display device according to claim 2 , further comprising a second inorganic insulation film between the first transparent insulation substrate and the organic insulation film, wherein
the second inorganic insulation film covers a part of the source electrode,
the second inorganic insulation film has a third hole,
the pixel electrode is connected to the source electrode via the third hole.
4. The display device according to claim 3 , wherein the second insulation film is directly contacts the second part of the first insulation film.
5. The display device according to claim 4 , further comprising a first orientation film,
wherein the pixel electrode is disposed between the first orientation film and the first inorganic insulation film.
6. The display device according to claim 5 , wherein the pixel electrode does not contact the organic insulation film.
7. The display device according to claim 5 , further comprising a metal portion electrically connected to the counter electrode, wherein
the portion is located outside of the first hole.
8. The display device according to claim 7 , wherein the metal portion directly contacts the counter electrode and disposed between the organic insulation film and the first inorganic insulation film.
9. The display device according to claim 8 , wherein the metal portion is formed of the same material as the source electrode.
10. The display device according to claim 7 , wherein the metal portion has at least two-layered structure including a upper layer and a lower layer.
11. The display device according to claim 10 , wherein the lower layer of the metal portion directly contacts the counter electrode.
12. The display device according to claim 11 , wherein the upper layer of the metal portion includes a material at least containing an aluminum.
13. The display device according to the claim 12 , wherein the lower layer of the metal portion includes a material at least containing an molybden or tungsten.
14. The display device according to claim 10 , wherein a thickness of the upper layer is larger than a thickness of the lower layer.
15. The display device according to claim 8 , wherein the metal portion are located near the second hole and not overlapped to the second hole.
16. The display device according to claim 15 , further comprising a display area performing a display of an image, wherein the display area has a plurality of the second hole, the plurality of the second hole are arranged in a matrix form, the metal portion is located between the two contact regions.
17. A display device comprising:
a first transparent insulation substrate;
an organic insulation film having a first hole;
a first inorganic insulation film having a second hole located inside of the first hole;
a source electrode connected to a semiconductor film between the first transparent insulation substrate and the organic insulation film; and
a pixel electrode connected to the source electrode via the first hole, the second hole;
wherein
a first part of the first inorganic insulation film is formed along a side surface of the first hole,
a second part of the first inorganic insulation film is extending from the first part toward a center of the first hole.
18. The display device according to claim 17 , further comprising a gate line extending in a first direction, wherein a width of the first part in the first direction is larger than a width of the second part in the first direction.
19. The display device according to claim 18 , wherein the second hole has a large hole and a small hole, the large hole is formed by the first part, the small hole is formed by the second part.