Substrate with topological features for steering fluidic assembly LED disks
Embodiments are related to integrated circuit (IC) fabrication and, more particularly, to a fluidic assembly process for the placement of light emitting diodes on a direct-emission display substrate.
1. A method for forming a fluidic assembly direct-emission display panel, the method comprising:
providing a substrate with a planar top surface and interconnect pads aligned in a plurality of parallel rows;
forming a first film overlying the substrate top surface;
forming a plurality of wells in the first film, each well having a cross-sectional opening, and aligned in a corresponding row and column, exposing a corresponding interconnect pad;
forming a second film overlying the first film; and
forming a plurality of parallel slots in the second film, where each slot has a width greater than the well cross-sectional opening, exposing a corresponding column of wells.
2. The method of claim 1 , wherein forming the wells in the first film includes forming wells with a perimeter; and wherein forming the slots in the second film includes forming through-indentations in a sidewall of each slot, with the through-indentations exposing at least a portion of each well perimeter.
3. The method of claim 1 , the method further comprising:
flowing an ink comprising a solvent and a plurality of light emitting diode (LED) disks, where each LED disk has a disk diameter less than the well cross-sectional opening, and a bottom surface with a lower contact;
channeling the ink into the plurality of slots;
capturing the LED disks in the wells; and
making contact between the lower contact of each LED disk and a corresponding bottom trace.
4. The method of claim 1 , wherein forming the first film includes forming the first film with a first thickness; wherein flowing the ink includes flowing an ink comprising LED disks having about the first thickness; and the method further comprising:
subsequent to capturing the LED disks in the wells, forming an insulating material to isolate LED disk sidewalls from subsequently formed top conductive traces, with vias exposing LED disk top contacts; and
forming a plurality of top electrically conductive traces overlying the insulator material and connected the top contact of a column of LED disks.
5. The method of claim 1 , the method further comprising:
subsequent to capturing the LED disks in the wells, removing the second film.
6. The method of claim 1 , the method further comprising:
prior to forming the first film, forming through-hole vias (THVs) co-located with each interconnect pad.
7. The method of claim 1 , the method further comprising:
prior to forming the first film, forming through-hole vias (THVs) co-located with each interconnect pad, each THV having a THV diameter less than the LED disk diameter;
simultaneous with flowing the ink, creating vacuum pressure through the THVs; and,
wherein capturing the LED disks in the wells includes capturing the LED disks at least partially in response to the vacuum pressure.