Air gap and air spacer pinch off
Embodiments are directed to a method of forming a semiconductor device and resulting structures having an air spacer between a gate and a contact by forming a gate on a substrate and over a channel region of a semiconductor fin. A contact is formed on a doped region of the substrate such that a space between the contact and the gate defines a trench. A first dielectric layer is formed over the gate and the contact such that the first dielectric layer partially fills the trench. A second dielectric layer is formed over the first dielectric layer such that an air spacer forms in the trench between the gate and the contact.
1. A method for forming a semiconductor device, the method comprising:
forming a trench in a dielectric layer;
forming a metal barrier liner on the dielectric layer, the metal barrier liner filling a first portion of the trench;
forming a first liner comprising a first material on the metal barrier liner, the first liner filling a second portion of the trench;
forming a second liner comprising a second material on the first liner, the second liner filling a third portion of the trench;
forming a contact in the trench, the contact filling a remaining portion of the trench; and
self-forming a third liner comprising a third material by diffusing a portion of the second material in the second liner across the first liner and into the metal barrier liner, wherein the first material is cobalt, the second material is manganese, and the third material is a metal silicate, wherein the metal silicate is selected from a group consisting of MnSiO x , MnSiCO x , and MnSiCNO.
2. The method of claim 1 , further comprising forming a cap on a surface of the contact and the dielectric layer.
3. The method of claim 2 , wherein the cap comprises SiNC, SiCNO, SiNx, SiNO, or SiC.
4. A method for forming a semiconductor device, the method comprising:
forming a trench in a first dielectric layer;
forming a first liner comprising a first material on the first dielectric layer, the first liner partially filling the trench;
forming a second liner comprising a second material on the first liner;
forming a contact in the trench, the second liner between the contact and the first dielectric layer; and
self-forming a third liner comprising a third material by diffusing a portion of the second material through the first liner, wherein the first material is cobalt, the second material is manganese, and the third material is a metal silicate, wherein the metal silicate is selected from a group consisting of MnSiO x , MnSiCO x , and MnSiCNO.
5. The method of claim 4 , further comprising forming a metal barrier liner between the first liner and the first dielectric layer.
6. A semiconductor device comprising:
a first and a second contact formed on a first dielectric layer, the first contact adjacent to the second contact;
a first cap on a surface of the first contact and a second cap on a surface of the second contact;
a barrier liner over the first and second contacts, the first and second caps, and the first dielectric layer, the barrier liner partially filling a trench between the first and second contacts;
a second dielectric layer over the barrier liner;
an air gap in the trench, the air gap trapped between the barrier liner and the second dielectric layer; and
self-forming barrier layers, the self-forming barrier layers formed between portions of the barrier liner and the first and second dielectric layers, wherein the barrier liner comprises MnN y and the self-forming barrier layers comprise MnN y SiCNO.
7. The semiconductor device of claim 6 , wherein the second dielectric layer pinches off an opening of the trench.