Filter circuit in radio frequency power detection circuit
A filter circuit in a radio frequency power detection circuit includes input and output lines, wherein: an input terminal of the input and output lines is connected with a first capacitor, the first capacitor is connected with a first filtering sub-circuit; the first filtering sub-circuit is connected with a third capacitor, the third capacitor is connected with a second filtering sub-circuit; the second filtering sub-circuit is connected with an output terminal of the input and output lines. The filter circuit of the present invention is able to effectively improve the detection accuracy of the radio frequency electric source output power, thereby improving the power output accuracy of the radio frequency electric source.
1. A filter circuit in a RF (radio frequency) power detection circuit comprising: input and output lines, wherein:
an input terminal of the input and output lines is connected with a first capacitor, the first capacitor is connected with a first filtering sub-circuit the first filtering sub-circuit is connected with a third capacitor, the third capacitor is connected with a second filtering sub-circuit the second filtering sub-circuit is connected with an output terminal of the input and output lines;
a capacitance of the first capacitor is 100 pF and a capacitance of the third capacitor is 745 pF.
2. A filter circuit in a RF (radio frequency) power detection circuit comprising: input and output lines, wherein:
an input terminal of the input and output lines is connected with a first capacitor, the first capacitor is connected with a first filtering sub-circuit the first filtering sub-circuit is connected with a third capacitor, the third capacitor is connected with a second filtering sub-circuit the second filtering sub-circuit is connected with an output terminal of the input and output lines;
a first resistor is connected between the first capacitor and the first filtering sub-circuit in series, a second resistor is connected between the second filtering sub-circuit and an output terminal of the input and output lines in series, one end of a third resistor is connected with the output terminal of the input and output lines, and the other end of the third resistor is connected with ground.
3. The filter circuit in the RF power detection circuit, as recited in claim 2 , wherein: a resistance of the first resistor is 100Ω, and a resistance of the second resistor and the third resistor is 2000Ω.
4. The filter circuit in the RF power detection circuit, as recited in claim 3 , wherein: the first filtering sub-circuit comprises a first inductor and a second capacitor connected with the first inductor; and the second filtering sub-circuit comprises a second inductor and a fourth capacitor connected with the second inductor.
5. The filter circuit in the RF power detection circuit, as recited in claim 4 , wherein: an inductance of the first inductor of the first filtering sub-circuit is 4.5 μH and a capacitance of the second capacitor thereof is 1100 pF.
6. The filter circuit in the RF power detection circuit, as recited in claim 5 , wherein: an inductance of the second inductor of the second filtering sub-circuit is 6.7 μH and a capacitance of the fourth capacitor thereof is 272 pF.
7. The filter circuit in the RF power detection circuit, as recited in claim 2 , wherein: the first filtering sub-circuit comprises a first inductor and a second capacitor connected with the first inductor; and the second filtering sub-circuit comprises a second inductor and a fourth capacitor connected with the second inductor.
8. The filter circuit in the RF power detection circuit, as recited in claim 7 , wherein: an inductance of the first inductor of the first filtering sub-circuit is 4.5 μH and a capacitance of the second capacitor thereof is 1100 pF.
9. The filter circuit in the RF power detection circuit, as recited in claim 8 , wherein: an inductance of the second inductor of the second filtering sub-circuit is 6.7 μH and a capacitance of the fourth capacitor thereof is 272 pF.