Conductive laminate for touch panel and method for producing conductive laminate for touch panel
A conductive laminate for a touch panel including a substrate which is light-transmitting, an underlayer which is light-transmitting and formed on at least one surface of the substrate, a first copper oxynitride layer formed on the underlayer on an opposite side of the substrate, a copper layer formed on the first copper oxynitride layer on an opposite side of the underlayer, and a second copper oxynitride layer formed on the copper layer on an opposite side of the first copper oxynitride layer.
1. A conductive laminate for a touch panel, comprising:
a substrate which is light-transmitting;
an underlayer which is light-transmitting and formed on at least one surface of the substrate;
a first copper oxynitride layer formed on the underlayer on an opposite side of the substrate;
a copper layer formed on the first copper oxynitride layer on an opposite side of the underlayer; and
a second copper oxynitride layer formed on the copper layer on an opposite side of the first copper oxynitride layer,
wherein oxygen atoms of the second copper oxynitride layer are in a range of 12% or more by atom and 42% or less by atom.
2. The conductive laminate of claim 1 , wherein the underlayer, the first copper oxynitride layer, the copper layer, and the second copper oxynitride layer form a laminate structure, and the laminate structure is formed on a first surface of the substrate and a second surface of the substrate opposite to the first surface such that the underlayer of the first structure is in contact with the first surface and the underlayer of the second structure is in contact with the second surface.
3. The conductive laminate of claim 1 , wherein the underlayer comprises an ultraviolet-curable multifunctional acrylate, an ultraviolet-curable monofunctional acrylate, an acrylic polymer having an ultraviolet-curable acrylic group, and an anti-blocking agent that reduces adhesiveness of a surface of the second copper oxynitride layer on an opposite side of the copper layer, and
the underlayer is formed on the substrate such that the underlayer fills a plurality of recesses formed on the surface of the substrate.
4. The conductive laminate of claim 2 , wherein the underlayer comprises an ultraviolet-curable multifunctional acrylate, an ultraviolet-curable monofunctional acrylate, an acrylic polymer having an ultraviolet-curable acrylic group, and an anti-blocking agent that reduces adhesiveness of a surface of the second copper oxynitride layer on an opposite side of the copper layer, and
the underlayer is formed on the substrate such that the underlayer fills a plurality of recesses formed on each of the first and second surfaces.
5. The conductive laminate of claim 1 , wherein the copper layer has a thickness in a range of from 200 nm to 500 nm, and
the first copper oxynitride layer has a thickness which falls within a range of from 30 nm to 50 nm and is 25% or less of the thickness of the copper layer.
6. The conductive laminate of claim 1 , wherein the second copper oxynitride layer is formed such that the second copper oxynitride layer has a Y value in an XYZ color system of 20% or less when the second copper oxynitride layer is formed.
7. The conductive laminate of claim 1 , wherein the first copper oxynitride layer includes an oxygen atom in a range of from 4% by atom to 19% by atom.
8. The conductive laminate of claim 1 , wherein the underlayer and the first copper oxynitride layer are formed such that an adhesion strength at an interface between the underlayer and the first copper oxynitride layer is 8.0 N/15 mm or more.
9. The conductive laminate of claim 5 , wherein a laminate including the first copper oxynitride layer, the copper layer and the second copper oxynitride layer has a surface resistivity of 0.13 Ω/sq. or less.
10. The conductive laminate of claim 1 , wherein a surface of the underlayer in contact with the first copper oxynitride layer has a surface roughness Ra in a range of from 3 nm to 20 nm.
11. A method of producing the conductive laminate of claim 1 , comprising:
forming the underlayer on the at least one surface of the substrate;
forming the first copper oxynitride layer on the underlayer on the opposite side of the substrate by sputtering;
forming the copper layer on the first copper oxynitride layer on the opposite side of the underlayer by sputtering; and
forming the second copper oxynitride layer on the copper layer on the opposite side of the first copper oxynitride layer by sputtering.
12. The method of claim 11 , wherein the forming of the underlayer includes forming the underlayer on each of a first surface of the substrate and a second surface opposite to the first surface.