IP Library Granted Patent US 10,461,125
Granted Patent B2
US 10,461,125 · App. 15/689,155 · Granted Oct 29, 2019

Three dimensional memory arrays

Inventors: Agostino Pirovano (Milan, IT); Andrea Redaelli (Casatenovo, IT); Fabio Pellizzer (Boise, ID); Innocenzo Tortorelli (Cernusco sul Naviglio, IT)
Assignee: Micron Technology, Inc.
H01L27/2409H01L27/115H01L27/249H01L27/2436H01L45/04H01L45/147
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Quick Facts
Patent No.
US 10,461,125
App. No.
15/689,155
Granted
Oct 29, 2019
Kind
B2
Abstract

In an example, a memory array may include a plurality of first dielectric materials and a plurality of stacks, where each respective first dielectric material and each respective stack alternate, and where each respective stack comprises a first conductive material and a storage material. A second conductive material may pass through the plurality of first dielectric materials and the plurality of stacks. Each respective stack may further include a second dielectric material between the first conductive material and the second conductive material.

Claims (31)

1. A memory array, comprising:

a plurality of first dielectric materials and a plurality of stacks, wherein each respective first dielectric material and each respective stack alternate, and wherein each respective stack comprises a first conductive material and a storage material on only one side of the first conductive material;

a second conductive material passing through the plurality of first dielectric materials and the plurality of stacks such that a major axis of the second conductive material is perpendicular to a major axis of the storage material; and

a second dielectric material in direct physical contact with the second conductive material and passing through the plurality of first dielectric materials and the plurality of stacks between the second conductive material and the plurality of stacks;

wherein each respective stack further comprises a third dielectric material between the first conductive material and the second dielectric material such that the storage material of the respective stack is on only one side of the third dielectric material, the second dielectric material is between the second conductive material and the third dielectric material, and the third dielectric material is in direct physical contact with the first conductive material and the second dielectric material.

2. The memory array of claim 1 , wherein the storage material is in direct physical contact with the second dielectric material.

3. The memory array of claim 1 , wherein the second dielectric material is in direct physical contact with the plurality of first dielectric materials.

4. The memory array of claim 1 , wherein each respective stack further comprises a fourth dielectric material between the first conductive material and the storage material.

5. The memory array of claim 1 , wherein the first conductive material and the storage material are at different levels within each respective stack.

6. The memory array of claim 1 , wherein the major axis of the second conductive material is perpendicular to major axes of the plurality of first dielectric materials.

7. The memory array of claim 1 , wherein the storage material is a self-selecting storage material.

8. The memory array of claim 1 , wherein the storage material is formed around the second conductive material.

9. The memory array of claim 1 , wherein the storage material comprises a chalcogenide material.

10. A memory array, comprising:

a stack of memory cells;

a first dielectric material; and

a first conductive material in direct physical contact with the first dielectric material;

wherein each respective memory cell comprises:

a respective portion of the first conductive material;

a respective portion of the first dielectric material;

a second conductive material;

a storage material on only one side of the second conductive material such that a major axis of the first conductive material is perpendicular to a major axis of the storage material; and

a second dielectric material between the second conductive material and the first dielectric material such that the storage material is on only one side of the second dielectric material, the first dielectric material is between the first conductive material and the second dielectric material and the second dielectric material is in direct physical contact with the first dielectric material and the second conductive material.

11. The memory array of claim 10 , wherein the memory cells are separated from each other by an additional dielectric material.

12. The memory array of claim 10 , wherein the first dielectric material is between the first conductive material and the storage material.

13. The memory array of claim 10 , wherein each respective memory cell comprises an additional dielectric material between the second dielectric material and the storage material.

14. The memory array of claim 13 , wherein the additional dielectric material is between the second conductive material and the storage material.

15. The memory array of claim 10 , wherein the storage material of each respective memory cell is to form a conductive path between the first conductive material and the second conductive material.

16. The memory array of claim 10 , wherein the major axis of the first conductive material is perpendicular to a major axis of the second conductive material.

17. The memory array of claim 10 , wherein the second conductive material and the storage material of each respective memory cell are formed around the first conductive material.

18. The memory array of claim 1 , wherein a surface of the charge storage material, in each respective stack, that is in direct physical contact with the second dielectric material is coplanar with a surface of the third dielectric material, in each respective stack, that is in direct physical contact with the second dielectric material.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050709/0838 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0333 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 044653/0333 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 044348/0253 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 29, 2017
From: PIROVANO, AGOSTINO; REDAELLI, ANDREA; PELLIZZER, FABIO; TORTORELLI, INNOCENZO
To: MICRON TECHNOLOGY, INC.
Reel/Frame 043433/0215 →
Cited By (3)
US 12,356,635 US 12,563,748 US 12,690,397