Zeolite film structure
A zeolite film structure comprising a support, a zeolite film and a protective film. The zeolite film is formed on a surface of the support. The protective film is formed on a surface of the zeolite film. The protective film is configured from organic-nonorganic hybrid silica or carbon. An average thickness of the protective film is less than or equal to 172 nanometers and greater than or equal to 44 nanometers.
1. A zeolite film structure comprising:
a support,
a zeolite film formed on a surface of the support, and
a protective film formed on a surface of the zeolite film and configured from organic-nonorganic hybrid silica or carbon, wherein
an average thickness of the protective film is less than or equal to 172 nanometers and greater than or equal to 44 nanometers.
2. The zeolite film structure according to claim 1 , wherein
a surface roughness Ra on the surface of the zeolite film is less than or equal to 1.74 micrometers.
3. The zeolite film structure according to claim 2 , wherein
a surface roughness Ra on the surface of the support is less than or equal to 2.13 micrometers.
4. The zeolite film structure according to claim 1 , wherein
a surface roughness Ra on the surface of the zeolite film is greater than or equal to 0.28 micrometers.
5. The zeolite film structure according to claim 4 , wherein
a surface roughness Ra on the surface of the support is greater than or equal to 0.29 micrometers.