Support pillar
A CMOS single chip includes a movable film, at least one support pillar, a base metal layer and a circuit integration. The movable film is disposed on a top layer of the CMOS single chip and has a plurality of through-vias. The support pillar is disposed under the movable film to provide a supporting force of the movable film. The base metal layer is formed under the support pillars and isolated from the support pillars, and faces towards the movable film to form a micro capacitor to sense one of the outside sensing signals. The area of the base metal layer is larger than the area of the movable film. The circuit integration is formed under the base metal layer, or formed under the base metal layer and on the side of the movable film, and connected to the movable film and the base metal layer.
1. A Complementary Metal-Oxide-Semiconductor (CMOS) sensing component, manufactured by CMOS process, comprising:
a movable film;
a plurality of through-vias formed in the movable film;
at least one of a plurality of support pillars disposed under the movable film to provide a supporting force of the movable film, wherein each of the plurality of support pillars comprising an insulating layer; and
a base metal layer formed under the plurality of support pillars and isolated from the plurality of support pillars,
wherein the base metal layer faces towards the movable film,
wherein an inner-annular-supported acoustic collection film of the movable film, the insulating layer and the base metal layer form a micro capacitor to sense one of outside sensing signals, and
wherein an area of the base metal layer is larger than an area of the movable film.
2. The CMOS sensing component according to claim 1 , wherein the one of the outside sensing signals is an acceleration, a voice, a flow speed of fluid, a pressure, a momentum, an impulse, a stress, a temperature variation, a polarity variation or a humidity.
3. A CMOS single chip, manufactured by CMOS process, and the CMOS single chip comprising:
a movable film disposed as a top layer of the CMOS single chip;
a plurality of through-vias formed in the movable film;
at least one of a plurality of support pillars disposed under the movable film to provide a supporting force of the movable film and connect to the movable film, wherein each of the plurality of support pillars comprising an insulating layer;
a base metal layer formed under the plurality of support pillars and isolated from the plurality of support pillars,
wherein the base metal layer faces towards the movable film,
wherein an inner-annular-supported acoustic collection film of the movable film, the insulating layer and the base metal layer form a micro capacitor to sense one of outside sensing signals, and
a circuit integration formed under the base metal layer or formed under the base metal layer and on a side of the movable film, wherein the circuit integration provides operation voltages to the movable film and the base metal layer, receives the one of the outside sensing signals generated and sensed by the movable film and the base metal layer, and converts the one of the outside sensing signals into an output signal.
4. The CMOS single chip according to claim 3 , further comprising:
a plurality of pads formed on a side of the movable film and connected to the circuit integration.
5. The CMOS single chip according to claim 3 , wherein the one of the outside sensing signals is an acceleration, a voice, a flow speed of fluid, a pressure, a momentum, an impulse, a stress, a temperature variation, a polarity variation or a humidity.
6. The CMOS single chip according to claim 3 , an area of the base metal layer is larger than an area of the movable film.
7. A CMOS single chip, manufactured by CMOS process, and the CMOS single chip comprising:
an annular side wall;
a movable film disposed as a top layer of the CMOS single chip, and a peripheral of the movable film fixed by the annular side wall;
a plurality of through-vias formed in the movable film;
at least one of a plurality of support pillars formed under the movable film to provide a supporting force of the movable film, wherein each of the plurality of support pillar comprising an insulating layer;
a base metal layer formed under the plurality of support pillars and isolated form the plurality of support pillars,
wherein the base metal layer faces towards the movable film,
wherein an inner-annular-supported acoustic collection film of the movable film, the insulating layer and the base metal layer form a micro capacitor to sense one of outside sensing signals, and
a circuit integration formed under the base metal layer or formed under the base metal layer and on side of the movable film, wherein the circuit integration connected to the movable film and the base metal layer to provide operation voltages to the movable film and the base metal layer, to receive the one of the outside sensing signals generated and sensed by the movable film and the base metal layer, and to convert the one of the outside sensing signals into an output signal.
8. The CMOS single chip according to claim 7 , further comprising:
a plurality of pads formed on a side of the movable film and connected to the circuit integration.
9. The CMOS single chip according to claim 7 , wherein the one of the outside sensing signals is an acceleration, a voice, a flow speed of fluid, a pressure, a momentum, an impulse, a stress, a temperature variation, a polarity variation or a humidity.
10. The CMOS single chip according to claim 7 , wherein an area of the base metal layer is larger than an area of the movable film.