Switchable filters and design structures
Switchable and/or tunable filters, methods of manufacture and design structures are disclosed herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed to be in contact with at least one piezoelectric substrate. The method further includes forming a micro-electro-mechanical structure (MEMS) comprising a MEMS beam in which, upon actuation, the MEMS beam will turn on the at least one piezoelectric filter structure by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes.
1. A method comprising:
determining a frequency of a filter or need to have the filter activated; and
turning on one or more filters by actuating a MEMS beam by interleaving electrodes in contact with the piezoelectric substrate or sandwiching the at least one piezoelectric substrate between the electrodes, in response to the determining,
wherein the filter is a BAW filter.
2. The method of claim 1 , wherein the MEMS beam is one of a cantilever beam and a bridge beam.
3. The method of claim 1 , wherein the MEMS beam is positioned over the interleaved electrodes formed on an underlying insulator layer.