IP Library Granted Patent US 10,128,311
Granted Patent B2
US 10,128,311 · App. 15/691,469 · Granted Nov 13, 2018

Magnetic memory device

Inventor: Yuichi Ito (Seongnam-si, KR)
Assignee: TOSHIBA MEMORY CORPORATION
H01L27/228G11C11/161G11C11/1673H01L23/552H01L43/02H01L43/08H01L43/12H01L43/10
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Quick Facts
Patent No.
US 10,128,311
App. No.
15/691,469
Granted
Nov 13, 2018
Kind
B2
Abstract

According to one embodiment, a magnetic memory device includes a memory cell array unit including magnetoresistive elements provided in an array in first and second directions, each including a first magnetic layer having a variable magnetization direction, a second magnetic layer having a fixed magnetization direction, and a nonmagnetic layer between the first and second magnetic layers, first transistors provided in an array in the first and second directions, and electrically connected to the magnetoresistive elements, respectively, switching units each electrically connected to corresponding ones of the first transistors in series, and each including at least one second transistor, wherein the first magnetic layers are separated from each other in the first and second directions, and the second magnetic layers are continuously provided in the first and second directions.

Claims (47)

1. A magnetic memory device comprising a memory cell array unit,

the memory cell array unit comprising:

a plurality of magnetoresistive elements provided in an array form in a first direction and a second direction, each of the magnetoresistive elements including a first magnetic layer having a variable magnetization direction, a second magnetic layer having a fixed magnetization direction, and a nonmagnetic layer between the first magnetic layer and the second magnetic layer;

a plurality of first transistors provided in an array form in the first direction and the second director, and electrically connected to the magnetoresistive elements, respectively;

a plurality of first word lines each extending in the first direction, and each selecting corresponding first transistors from the plurality of first transistors;

a plurality of switching units each electrically connected to corresponding first transistors of the plurality of first transistors in series, and each including at least one second transistor; and

a plurality of second word lines each extending in the second direction, and each selecting a corresponding switching unit from the plurality of switching units, wherein

the first magnetic layers included in the magnetoresistive elements are separated from each other in the first and second directions, and

the second magnetic layers included in the magnetoresistive elements are continuously provided in the first and second directions.

2. The magnetic memory device of claim 1 , wherein

the nonmagnetic layers included in the magnetoresistive elements are continuously provided in the first and second directions.

3. The magnetic memory device of claim 1 , wherein

the nonmagnetic layers included in the magnetoresistive elements are separated from each other in the first and second directions.

4. The magnetic memory device of claim 1 , wherein

each of the magnetoresistive elements further includes a third magnetic layer having a magnetization direction anti-parallel to the magnetization direction of the second magnetic layer, and

the second magnetic layer is provided between the third magnetic layer and the nonmagnetic layer.

5. The magnetic memory device of claim 4 , wherein

the third magnetic layers included in the magnetoresistive elements are continuously provided in the first and second directions.

6. The magnetic memory device of claim 1 , wherein

the memory cell array unit further includes a first plate electrode electrically connected to the magnetoresistive elements and continuously provided in the first and second directions.

7. The magnetic memory device of claim 1 , wherein

the memory cell array unit further includes a second plate electrode electrically connected to the switching units and continuously provided in the first and second directions.

8. The magnetic memory device of claim 1 , wherein

each of the switching units includes a single second transistor electrically connected to corresponding first transistors of the plurality of first transistors in series.

9. The magnetic memory device of claim 1 , wherein

each of the switching units includes a plurality of second transistors each electrically connected to a corresponding first transistor of the plurality of first transistors in series.

10. The magnetic memory device of claim 1 , wherein

each of the first transistors includes a semiconductor portion having a channel length direction perpendicular to the first direction and the second direction, a gate electrode which surrounds the semiconductor portion, and a gate insulating layer provided between the semiconductor portion and the gate electrode.

11. The magnetic memory device of claim 1 , wherein

the at least one second transistor each includes a semiconductor portion having a channel length direction perpendicular to the first direction and the second direction, a gate electrode which surrounds the semiconductor portion, and a gate insulating layer provided between the semiconductor portion and the gate electrode.

12. The magnetic memory device of claim 1 , wherein

a layer including the first transistors is located between a layer including the magnetoresistive elements and a layer including the switching units.

13. The magnetic memory device of claim 1 , wherein

a layer including the first transistors and a layer including the switching units are provided between a layer including the magnetoresistive elements and a semiconductor substrate.

14. The magnetic memory device of claim 1 , wherein

a layer including the magnetoresistive elements is provided between a layer including the first transistors and a semiconductor substrate.

15. The magnetic memory device of claim 1 , wherein

the memory cell array unit further includes a peripheral circuit provided between a semiconductor substrate and an area including the magnetoresistive elements, the first transistors and the switching units.

16. The magnetic memory device of claim 1 , wherein

the memory cell array unit further includes first and second magnetic shield layers such that the magnetoresistive elements, the first transistors and the switching units are interposed between the first and second magnetic shield layers.

17. The magnetic memory device of claim 1 , wherein

the second magnetic layers included in the magnetoresistive elements also function as a plate electrode.

18. The magnetic memory device of claim 1 , wherein

the second direction is perpendicular to the first direction.

19. The magnetic memory device of claim 1 , wherein

the magnetic memory device comprises a plurality of the memory cell array units.

20. The magnetic memory device of claim 19 , further comprising a plurality of sense amplifiers connected to the memory cell array units, respectively.

Assignments (4)
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 30, 2017
From: ITO, YUICHI
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043452/0336 →
Continuity (2)
Provisional Application 62473056 · Mar 17, 2017
Related Publication 20180269255A1 · Sep 20, 2018
Cited By (1)
US 12,201,034