Semiconductor structures including memory materials substantially encapsulated with dielectric materials, and related systems and methods
View Patent ↗A semiconductor structure includes stack structures. Each of the stack structures comprises a first conductive material, a chalcogenide material over the first conductive material, a second conductive material over the chalcogenide material, and a first dielectric material between the chalcogenide material and the first conductive material and between the chalcogenide material and the second conductive material. The semiconductor structure further comprises a second dielectric material on at least sidewalls of the chalcogenide material. The chalcogenide material may be substantially encapsulated by one or more dielectric materials. Related semiconductor structures and related methods are disclosed.
1. A semiconductor structure, comprising:
stack structures, each stack structure comprising:
a first conductive material;
a chalcogenide material over the first conductive material;
a second conductive material over the chalcogenide material; and
a first dielectric material between the chalcogenide material and the first conductive material and between the chalcogenide material and the second conductive material;
a second dielectric material on sidewalls of at least the chalcogenide material; and
a third dielectric material between the second dielectric material and the sidewalls of the chalcogenide material.
2. The semiconductor structure of claim 1 , wherein the first dielectric material and the second dielectric material each comprise aluminum oxide.
3. The semiconductor structure of claim 1 , wherein the first dielectric material between the chalcogenide material and the first conductive material has a different thickness than the second dielectric material.
4. The semiconductor structure of claim 1 , wherein the chalcogenide material comprises a self-selecting memory material.
5. The semiconductor structure of claim 1 , wherein the first dielectric material and the second dielectric material, in combination, substantially surround the chalcogenide material.
6. The semiconductor structure of claim 1 , wherein the third dielectric material comprises silicon dioxide or silicon nitride.
7. The semiconductor structure of claim 1 , wherein the first conductive material comprises a first electrode in direct contact with a first access line and the second conductive material comprises a second electrode in direct contact with a second access line.
8. The semiconductor structure of claim 1 , wherein at least one stack structure of the stack structures comprises the first conductive material, the first dielectric material, the chalcogenide material, the second conductive material, and the second dielectric material.
9. The semiconductor structure of claim 1 , wherein the second dielectric material contacts sidewalls of the first conductive material and the second conductive material.
10. The semiconductor structure of claim 1 , wherein at least one stack structure of the stack structures further comprises another chalcogenide material over the second conductive material.
11. The semiconductor structure of claim 10 , wherein the second dielectric material contacts sidewalls of the another chalcogenide material.
12. A semiconductor structure, comprising:
at least one memory cell, the at least one memory cell comprising:
a first conductive material;
a self-selecting memory material comprising a chalcogenide material;
a second conductive material;
a first dielectric material between the first conductive material and the chalcogenide material;
a second dielectric material between the second conductive material and the chalcogenide material, the second dielectric material separating the second conductive material from the chalcogenide material; and
a liner comprising a dielectric material in contact with sidewalls of the chalcogenide material and sidewalls of the first conductive material and the second conductive material.
13. The semiconductor structure of claim 12 , wherein the first dielectric material comprises aluminum oxide.
14. The semiconductor structure of claim 12 , wherein the chalcogenide material is substantially surrounded by a combination of the first dielectric material and the liner.
15. The semiconductor structure of claim 12 , wherein at least one of the first conductive material and the second conductive material comprises carbon.
16. A method of forming a semiconductor structure, the method comprising:
forming a first dielectric material over a first conductive material;
forming a chalcogenide material over the first dielectric material;
forming a second dielectric material over the chalcogenide material;
forming a second conductive material over the second dielectric material;
removing portions of the second conductive material, the second dielectric material, the chalcogenide material, and the first dielectric material to form line structures extending in a first direction;
forming a liner material over at least sidewalls of the line structures;
removing portions of the second conductive material, the second dielectric material, the chalcogenide material, and the first dielectric material in a second direction to form isolated stack structures; and
forming another liner material over sidewalls of the isolated stack structures to form a substantially encapsulated chalcogenide material in each stack structure.
17. The method of claim 16 , wherein forming a first dielectric material and forming a second dielectric material each comprises forming the first dielectric material and the second dielectric material to comprise aluminum oxide.
18. The method of claim 16 , wherein forming a liner material over at least sidewalls of the line structures comprises forming a liner material comprising a first portion comprising silicon dioxide or silicon nitride over the sidewalls and a second portion comprising aluminum oxide over the first portion.
19. The method of claim 16 , wherein forming another liner material over sidewalls of the isolated stack structures comprises forming the another liner material comprising a same material as the liner material over sidewalls of the isolated stack structures.
20. A system comprising:
a processor;
a semiconductor device operably coupled to the processor, the semiconductor device including at least one memory cell, the at least one memory cell comprising:
a first dielectric material over a first electrode;
a chalcogenide material over the first dielectric material;
a second dielectric material over the chalcogenide material;
a second electrode over the second dielectric material; and
a liner comprising a dielectric material on sidewalls of the chalcogenide material, the first electrode, and the second electrode; and
a power supply in operable communication with the processor.