IP Library Granted Patent US 10,147,875
Granted Patent B1
US 10,147,875 · App. 15/692,599 · Granted Dec 4, 2018

Semiconductor devices and electronic systems having memory structures

Inventors: Andrew J. Hansen (Boise, ID); James A. Cultra (Boise, ID)
Assignee: Micron Technology, Inc.
H01L45/12H01L27/224H01L27/2409H01L27/2463H01L43/02H01L43/08H01L43/12H01L45/065H01L45/085H01L45/1233H01L45/1253H01L45/16
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Quick Facts
Patent No.
US 10,147,875
App. No.
15/692,599
Granted
Dec 4, 2018
Kind
B1
Abstract

A semiconductor device comprises includes memory cells, a first dielectric liner material overlying side surfaces of the memory cells, a high-k dielectric material overlying side surfaces of the first dielectric liner material, a second dielectric liner material overlying side surfaces of the high-k dielectric material, and an additional dielectric material overlying side surfaces of the second dielectric liner material. A memory structure, an electronic system, and a method of forming a memory structure are also described.

Claims (35)

1. A semiconductor device, comprising:

memory cells, at least one of the memory cells comprising:

a first electrode structure;

a select device structure over the first electrode structure;

a storage element structure over the select device structure; and

a second electrode structure over the storage element structure;

a first dielectric liner material overlying side surfaces of the memory cells;

a high-k dielectric material overlying side surfaces of the first dielectric liner material;

a second dielectric liner material overlying side surfaces of the high-k dielectric material; and

an additional dielectric material overlying side surfaces of the second dielectric liner material.

2. The semiconductor device of claim 1 , further comprising a third electrode structure between the select device structure and the storage element structure.

3. The semiconductor device of claim 1 , wherein the first dielectric liner material exhibits a thickness less than or equal to about 100 Å and comprises one or more of silicon nitride, silicon oxynitride, silicon carbonitride, and silicon carboxynitride.

4. The semiconductor device of claim 1 , wherein the high-k dielectric material exhibits a thickness less than or equal to about 25 Å and comprises one or more of aluminum oxide, hafnium oxide, nitrided hafnium oxide, hafnium silicate oxide, aluminum-doped hafnium oxide, aluminum silicate oxide, zirconium oxide, tantalum pentoxide, lanthanum oxide, titanium oxide, and yttrium oxide.

5. The semiconductor device of claim 1 , wherein the second dielectric liner material exhibits a thickness less than or equal to about 100 Å and comprises one or more of silicon nitride, silicon oxynitride, silicon carbonitride, and silicon carboxynitride.

6. The semiconductor device of claim 1 , wherein the second dielectric liner material comprises substantially the same material composition as the first dielectric liner material.

7. The semiconductor device of claim 1 , wherein the second dielectric liner material comprises substantially the same thickness as the first dielectric liner material.

8. The semiconductor device of claim 1 , wherein the second dielectric liner material exhibits a different thickness than the first dielectric liner material.

9. The semiconductor device of claim 1 , wherein:

the first dielectric liner material comprises silicon nitride;

the high-k dielectric material comprises aluminum oxide; and

the second dielectric liner material comprises silicon nitride.

10. The semiconductor device of claim 1 , further comprising a dielectric oxide material between the second dielectric liner material and the additional dielectric material.

11. The semiconductor device of claim 1 , wherein the additional dielectric material comprises one or more of a carbonated dielectric oxide material and a boronated dielectric oxide material.

12. The semiconductor device of claim 1 , comprising a memory die.

13. An electronic system, comprising:

a memory device in communication with at least one of an electronic signal processor device, an input device, and an output device, the memory device including a memory structure comprising:

memory cells, at least one of the memory cells comprising:

a first electrode structure;

a select device structure over the first electrode structure;

a storage element structure over the select device structure; and

a second electrode structure over the storage element structure;

a first dielectric nitride material on side surfaces of the memory cells;

a high-k dielectric material on side surfaces of the first dielectric nitride material;

a second dielectric nitride material on side surfaces of the high-k dielectric material; and

an additional dielectric material over side surfaces of the second dielectric nitride material.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050709/0838 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0333 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 044348/0253 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 044653/0333 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2017
From: HANSEN, ANDREW J.; CULTRA, JAMES A.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 043563/0369 →
Cited By (5)
US 12,193,341 US 12,213,392 US 12,507,604 US 12,642,018 US 12,721,054