Cross-point memory and methods for fabrication of same
View Patent ↗The disclosed technology relates generally to integrated circuit devices, and in particular to cross-point memory arrays and methods for fabricating the same. In one aspect, a method of fabricating cross-point memory arrays comprises forming a memory cell material stack which includes a first active material and a second active material over the first active material, wherein one of the first and second active materials comprises a storage material and the other of the first and second active materials comprises a selector material. The method of fabricating cross-point arrays further comprises patterning the memory cell material stack, which includes etching through at least one of the first and second active materials of the memory cell material stack, forming protective liners on sidewalls of the at least one of the first and second active materials after etching through the one of the first and second active materials, and further etching the memory cell material stack after forming the protective liners on the sidewalls of the one of the first and second active materials.
1. A memory device, comprising:
a substrate;
a lower conductive line disposed above the substrate and extending in a first direction; and
an upper conductive line disposed above the lower conductive line and extending in a second direction different than the first direction; and
a memory cell stack interposed between the lower and upper conductive lines, the memory cell stack comprising, an upper active element and a lower active element, wherein the memory cell stack includes:
a first lateral plateau region such that a first width of the memory cell stack below the first lateral plateau region is wider than a second width of the memory cell stack above the first lateral plateau region; and
a second lateral plateau region between the upper active element and the lower active element such that the second width is wider than a third width of the memory cell stack above the second lateral plateau region.
2. The memory device of claim 1 , wherein the second width of the memory cell stack below the second lateral plateau region is between 10% and 50% wider than the third width of the memory cell stack above the second lateral plateau region.
3. The memory device of claim 1 , wherein the memory cell stack further comprises:
an upper electrode between the upper active element and the upper conductive line;
a middle electrode between the upper and lower active elements; and
a lower electrode between the lower active element and the lower conductive line.
4. The memory device of claim 3 , wherein the second lateral plateau region is formed below the upper active element.
5. The memory device of claim 3 , wherein the first lateral plateau region is formed below the lower active element and above the lower conductive line.
6. The memory device of claim 1 , further comprising:
a sealing dielectric having a first surface in contact with the memory cell stack and a second surface in contact with an isolation material, wherein the second surface includes the second lateral plateau region.