Backside configured surface plasmonic structure for infrared photodetector and imaging focal plane array enhancement
The invention relates to quantum dot and photodetector technology, and more particularly, to quantum dot infrared photodetectors (QDIPs) and focal plane array. The invention further relates to devices and methods for the enhancement of the photocurrent of quantum dot infrared photodetectors in focal plane arrays.
1. A backside configured focal plane array device comprising:
(a) a series of quantum dot layers disposed between a first contacting layer and a second contacting layer;
(b) backside configured surface plasmon polariton structures in direct contact with said second contacting layer;
(c) a silicon nitride passivation layer deposited over said surface plasmon polaritons structures;
(d) a metal contact in contact with said second contacting layer; and
(e) an indium bump in contact with said silicon nitride passivation layer deposited over said surface plasmon polaritons structures and said metal contact.
2. A backside configured focal plane array device comprising:
(a) a semi-insulating substrate;
(b) a first contacting layer in direct and continuous contact with said semi-insulating substrate;
(c) a set of first metal contacts in direct contact with said first contacting layer;
(d) a second contacting layer;
(e) a series of quantum dot layers disposed between said first contacting layer and said second contacting layer;
(f) surface plasmon polaritons structures in direct contact with said second contacting layer;
(g) a silicon nitride passivation layer deposited over said surface plasmon polaritons structures;
(h) a second metal contact in contact with said second contacting layer; and
(i) an indium bump in contact with said silicon nitride passivation layer deposited over said surface plasmon polaritons structures and said second metal contact.
3. The device of claim 2 wherein said semi-insulating substrate comprises GaAs.
4. The device of claim 2 wherein said silicon nitride passivation layer is deposited upon the side of said series of quantum dot layers disposed between said first contacting layer and said second contacting layer, said second contacting layer, and said second metal contact in contact with said second contacting layer.
5. The device of claim 2 wherein the quantum dot layers comprise gallium, indium, aluminum and arsenic.
6. The device of claim 2 capable of normal incidence detection.
7. The device of claim 2 wherein there is a buffer layer between said first contacting layer and said series of quantum dot layers.
8. The device of claim 2 wherein there is a buffer layer between said second contacting layer and said series of quantum dot layers.