Semiconductor device and method for manufacturing same
According to one embodiment, a stacked body includes a plurality of electrode layers stacked with an insulator interposed. A conductive via pierces the stacked body, and connects an upper layer interconnect and a lower layer interconnect. A insulating film is provided between the via and the stacked body. A distance along a diametral direction of the via between a side surface of the via and an end surface of one of the electrode layers opposing the side surface of the via is greater than a distance along the diametral direction between the side surface of the via and an end surface of the insulator opposing the side surface of the via.
1. A semiconductor device, comprising:
a lower layer interconnect;
an upper layer interconnect;
a stacked body provided between the lower layer interconnect and the upper layer interconnect, the stacked body including first and second electrode layers stacked with an insulator interposed;
a metal via piercing the stacked body, and connecting the upper layer interconnect and the lower layer interconnect; and
an insulating film provided between a side surface of the via and end surfaces of the first and second electrode layers, and between the side surface of the via and an end surface of the insulator,
a distance along a diametral direction of the via between the side surface of the via and the end surfaces of the first and second electrode layers being greater than a distance along the diametral direction between the side surface of the via and the end surface of the insulator.
2. The device according to claim 1 , wherein
the insulating film includes a portion surrounded by the end surface of one of the first and second electrode layers,
an interconnect width of the lower layer interconnect is smaller than an outer diameter of the portion of the insulating film.
3. The device according to claim 1 , wherein a thickness of the insulating film between the end surface of one of the first and second electrode layers and the side surface of the via is thicker than a thickness of the insulating film between the end surface of the insulator and the side surface of the via.
4. The device according to claim 1 , further comprising a conductive layer provided between the lower layer interconnect and the stacked body, the conductive layer being thicker than a thickness of one of the first and second electrode layers,
the via also piercing the conductive layer,
a distance along the diametral direction between the side surface of the via and an end surface of the conductive layer opposing the side surface of the via being greater than the distance along the diametral direction between the end surface of the insulator and the side surface of the via.
5. The device according to claim 4 , further comprising:
a plurality of columnar portions each including
a semiconductor body contacting the conductive layer and extending through the stacked body in a stacking direction of the stacked body, and
a charge storage portion provided between the semiconductor body and one of the first and second electrode layers.
6. The device according to claim 5 , wherein the conductive layer includes a semiconductor layer contacting the semiconductor body, and a metal layer stacked under the semiconductor layer.
7. The device according to claim 5 , wherein the via is disposed in a cell array region, the columnar portions being disposed in the cell array region.
8. The device according to claim 1 , further comprising a separation portion dividing the stacked body into a plurality of blocks,
the via being arranged on a line of extension of the separation portion.
9. A semiconductor device, comprising:
a lower layer interconnect;
an upper layer interconnect;
a stacked body provided between the lower layer interconnect and the upper layer interconnect, the stacked body including a plurality of electrode layers stacked with an insulator interposed;
a conductive via piercing the stacked body, and connecting the upper layer interconnect and the lower layer interconnect; and
an insulating film provided between the via and the stacked body and comprising a recess portion which is recessed in a direction towards the stacked body, the recess portion being provided between the via and one of the electrode layers,
a thickness of the insulating film between an end surface of one of the electrode layers and the side surface of the via being thicker than a thickness of the insulating film between an end surface of the insulator and the side surface of the via.
10. The device according to claim 9 , wherein
the insulating film includes a portion surrounded by the end surface of one of the electrode layers,
an interconnect width of the lower layer interconnect is smaller than an outer diameter of the portion of the insulating film.
11. The device according to claim 9 , further comprising a conductive layer provided between the lower layer interconnect and the stacked body, the conductive layer being thicker than a thickness of one of the electrode layers,
the via also piercing the conductive layer,
a distance along the diametral direction between the side surface of the via and an end surface of the conductive layer opposing the side surface of the via being greater than the distance along the diametral direction between the end surface of the insulator and the side surface of the via.
12. The device according to claim 11 , further comprising:
a plurality of columnar portions each including
a semiconductor body contacting the conductive layer and extending through the stacked body in a stacking direction of the stacked body, and
a charge storage portion provided between the semiconductor body and one of the electrode layers.
13. The device according to claim 12 , wherein the conductive layer includes a semiconductor layer contacting the semiconductor body, and a metal layer stacked under the semiconductor layer.
14. The device according to claim 12 , wherein the via is disposed in a cell array region, the columnar portions being disposed in the cell array region.
15. The device according to claim 9 , further comprising a separation portion dividing the stacked body into a plurality of blocks,
the via being arranged on a line of extension of the separation portion.