Pattern formation method, imprint device, and computer-readable non-volatile storage medium storing drop recipe adjustment program

1. A pattern formation method comprising:

forming a first imprint pattern for a prepared sample;

measuring residual film thickness distribution of the first imprint pattern;

calculating change rate of the residual film thickness of the first imprint pattern with respect to drop density of a resist material at the time of formation of the first imprint pattern;

forming a first etching pattern using the first imprint pattern as a mask;

measuring dimension distribution of the first etching pattern;

calculating a correction coefficient based on the residual film thickness distribution of the first imprint pattern and the dimension distribution of the first etching pattern;

correcting the residual film thickness of the first imprint pattern based on the correction coefficient to reduce a variation in size of the first etching pattern;

calculating a first drop density of an imprint material based on the change rate of the residual film thickness of the first imprint pattern with respect to drop density to obtain the corrected residual film thickness;

dropping the imprint material onto an etching material based on the first drop density;

pressing a template against the dropped imprint material to form the second imprint pattern with the corrected residual film thickness on the etching material;

etching the etching material using the second imprint pattern as a mask to form a second etching pattern;

determining whether dimension distribution of the second etching pattern falls within a specification;

calculating, when the dimension distribution of the second etching pattern does not fall within the specification, an additional residual film thickness to compensate for insufficient adjustment of the dimension of the second etching pattern; and

calculating a second drop density of the imprint material to obtain the additional residual film thickness.

2. The method according to claim 1 , wherein, in the correcting of the residual film thickness of the first imprint pattern, when there are a first region and a second region in which the first etching pattern is formed using the first imprint pattern as a mask and the dimension of the first etching pattern in the first region is smaller than the dimension of the first etching pattern in the second region, the residual film thickness of the second imprint pattern in the first region is made larger than the residual thickness of the first imprint pattern in the first region.

3. The method according to claim 2 , wherein there is a level difference between the first region and the second region.

4. The method according to claim 2 , wherein

the first region is a cell region in which a memory cell is arranged, and

the second region is a peripheral region in which a row decoder or a sense amplifier is arranged to operate the memory cell.

5. The method according to claim 1 , wherein the residual film thickness is corrected for each of shot regions at a time of imprinting.

6. The method according to claim 1 , wherein, in the calculating of the first drop density of the imprint material, when there are a first region and a second region in which the first etching pattern is formed using the first imprint pattern as a mask and the dimension of the first etching pattern in the first region is smaller than the dimension of the first etching pattern in the second region, the first drop density in the first region is made higher than the drop density of the resist material at the time of the formation of the first imprint pattern in the first region.

7. An imprint device comprising:

a stage to hold a wafer;

a drop unit to drop an imprint material onto the wafer;

a press unit to press a template against the imprint material dropped onto the wafer; and

a control unit to control drop position of the imprint material, wherein

the control unit

controls formation of a first imprint pattern for a prepared sample,

calculates change rate of residual film thickness of the first imprint pattern with respect to drop density of a resist material at the time of the formation of the first imprint pattern,

calculates a correction coefficient based on residual film thickness distribution of the first imprint pattern and dimension distribution of a first etching pattern that is formed using the first imprint pattern as a mask,

corrects the residual film thickness of the first imprint pattern based on the correction coefficient to reduce a variation in size of the first etching pattern,

calculates a first drop density of an imprint material based on the change rate of the residual film thickness of the first imprint pattern with respect to the drop density to obtain the corrected residual film thickness,

controls the drop unit to drop the imprint material onto an etching material based on the first drop density,

controls the press unit to press the template against the dropped imprint material to form the second imprint pattern with the corrected residual film thickness on the etching material,

determines whether dimension distribution of a second etching pattern falls within a specification, the second etching pattern being formed by etching the etching material using the second imprint pattern as a mask,

calculates, when the dimension distribution of the second etching pattern does not fall within the specification, an additional residual film thickness to compensate for insufficient adjustment of the dimension of the second etching pattern,

calculates a second drop density of the imprint material to obtain the additional residual film thickness, and

controls the drop unit to adjust a drop position of the imprint material depending on the second drop density.

8. The device according to claim 7 , wherein, when there are a first region and a second region in which the first etching pattern is formed using the first imprint pattern as a mask and the dimension of the first etching pattern in the first region is smaller than the dimension of the first etching pattern in the second region, the control unit controls the drop unit to adjust the drop position of the imprint material such that the residual film thickness of the second imprint pattern in the first region is made larger than the residual thickness of the first imprint pattern in the first region.

9. The device according to claim 7 , wherein the control unit corrects the residual film thickness for each of shot regions at a time of imprinting.

10. The device according to claim 7 , wherein, when there are a first region and a second region in which the first etching pattern is formed using the first imprint pattern as a mask and the dimension of the first etching pattern in the first region is smaller than the dimension of the first etching pattern in the second region, the control unit controls the drop unit to adjust the drop position of the imprint material such that the first drop density in the first region is made higher than the drop density of the resist material at the time of the formation of the first imprint pattern in the first region.

11. A computer-readable non-volatile recording medium storing a drop recipe adjustment program that causes a computer to execute:

calculating change rate of residual film thickness of a first imprint pattern with respect to drop density of a resist material at the time of formation of the first imprint pattern for a prepared sample;

calculating a correction coefficient based on residual film thickness distribution of the first imprint pattern and dimension distribution of a first etching pattern that is formed using the first imprint pattern as a mask;

correcting the residual film thickness of the first imprint pattern based on the correction coefficient to reduce a variation in size of the first etching pattern;

calculating a first drop density of an imprint material based on the change rate of the residual film thickness of the first imprint pattern with respect to the drop density to obtain the corrected residual film thickness;

controlling drops of the imprint material onto an etching material based on the first drop density;

determining whether dimension distribution of a second etching pattern falls within a specification, the second etching pattern being formed by etching the etching material using a second imprint pattern as a mask, the second imprint pattern having the corrected residual film thickness and being formed on the etching material by pressing the template against the dropped imprint material;

calculating, when the dimension distribution of the second etching pattern does not fall within the specification, an additional residual film thickness to compensate for insufficient adjustment of the dimension of the second etching pattern; and

calculating a second drop density of the imprint material to obtain the additional residual film thickness.

12. The medium according to claim 11 , wherein, in the correcting of the residual film thickness of the first imprint pattern, when there are a first region and a second region in which the first etching pattern is formed using the first imprint pattern as a mask and the dimension of the first etching pattern in the first region is smaller than the dimension of the first etching pattern in the second region, the residual film thickness of the second imprint pattern in the first region is made larger than the residual thickness of the first imprint pattern in the first region.

13. The medium according to claim 11 , wherein the residual film thickness is corrected for each of shot regions at a time of imprinting.

14. The medium according to claim 11 , wherein, in the calculating of the first drop density of the imprint material, when there are a first region and a second region in which the first etching pattern is formed using the first imprint pattern as a mask and the dimension of the first etching pattern in the first region is smaller than the dimension of the first etching pattern in the second region, the first drop density in the first region is made higher than the drop density of the resist material at the time of the formation of the first imprint pattern in the first region.