MEMS actuation systems and methods
A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).
1. A micro-electrical-mechanical system (MEMS) cantilever assembly comprising:
an intermediary cantilever portion;
a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion; and
a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS); and
a planar spanning structure configured to couple an upper surface of the intermediary cantilever portion to an upper surface of the plurality of intermediary links.
2. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 1 wherein the main cantilever arm includes:
a first distal end coupled to the moveable portion of the micro-electrical-mechanical system (MEMS); and
a second distal end coupled to the intermediary cantilever portion.
3. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 1 wherein the plurality of intermediary links includes:
two intermediary links configured to be non-parallel to the main cantilever arm.
4. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 3 wherein the two intermediary links are configured to be essentially orthogonal to the main cantilever arm.
5. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 1 wherein the plurality of intermediary links includes:
four intermediary links configured to be non-parallel to the main cantilever arm.
6. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 1 wherein the plurality of intermediary links are configured to absorb out-of-plane motion of the moveable portion of a micro-electrical-mechanical system (MEMS).
7. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 1 wherein the plurality of intermediary links are configured to torsionally-twist to absorb out-of-plane motion of the moveable portion of a micro-electrical-mechanical system (MEMS).
8. A micro-electrical-mechanical system (MEMS) cantilever assembly comprising:
an intermediary cantilever portion;
a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion; and
a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS), wherein the plurality of intermediary links includes two intermediary links configured to be non-parallel to the main cantilever arm;
a planar spanning structure configured to couple an upper surface of the intermediary cantilever portion to an upper surface of the plurality of intermediary links; and;
wherein the main cantilever arm includes a first distal end coupled to the moveable portion of the micro-electrical-mechanical system (MEMS) and a second distal end coupled to the intermediary cantilever portion.
9. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 8 wherein the two intermediary links are configured to be essentially orthogonal to the main cantilever arm.
10. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 8 wherein the plurality of intermediary links are configured to absorb out-of-plane motion of the moveable portion of a micro-electrical-mechanical system (MEMS).
11. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 8 wherein the plurality of intermediary links are configured to torsionally-twist to absorb out-of-plane motion of the moveable portion of a micro-electrical-mechanical system (MEMS).
12. A micro-electrical-mechanical system (MEMS) cantilever assembly comprising:
an intermediary cantilever portion;
a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion;
a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS); and
a planar spanning structure configured to couple an upper surface of the intermediary cantilever portion to an upper surface of the plurality of intermediary links;
wherein the main cantilever arm includes a first distal end coupled to the moveable portion of the micro-electrical-mechanical system (MEMS) and a second distal end coupled to the intermediary cantilever portion.
13. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 12 wherein the plurality of intermediary links includes:
two intermediary links configured to be non-parallel to the main cantilever arm.
14. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 13 wherein the two intermediary links are configured to be essentially orthogonal to the main cantilever arm.
15. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 12 wherein the plurality of intermediary links includes:
four intermediary links configured to be non-parallel to the main cantilever arm.
16. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 12 wherein the plurality of intermediary links are configured to absorb out-of-plane motion of the moveable portion of a micro-electrical-mechanical system (MEMS).
17. The micro-electrical-mechanical system (MEMS) cantilever assembly of claim 12 wherein the plurality of intermediary links are configured to torsionally-twist to absorb out-of-plane motion of the moveable portion of a micro-electrical-mechanical system (MEMS).