Semiconductor memory devices
A semiconductor memory device includes a semiconductor substrate having an active region of a first conductivity type defined by a device isolation layer, a first impurity region in the active region, an anti-fuse gate electrode on the semiconductor substrate and extending across the first impurity region, an anti-fuse gate dielectric layer between the anti-fuse gate electrode and the first impurity region, a selection gate electrode on the semiconductor substrate and extending across the active region, a selection gate dielectric layer between the selection gate electrode and the active region, and a second impurity region in the active region between the selection gate electrode and the anti-fuse gate electrode. The first and second impurity regions have impurities of a second conductivity type. The first impurity region has an impurity concentration less than the impurity concentration of the second impurity region.
1. A semiconductor memory device, comprising:
a semiconductor substrate including an active region defined by a device isolation layer, the active region having a first conductivity type;
a pair of anti-fuse gate electrodes on the semiconductor substrate;
anti-fuse gate dielectric layers between the anti-fuse gate electrodes and the substrate;
a selection gate electrode on the semiconductor substrate, the selection gate electrode being spaced apart from the anti-fuse gate electrodes;
a selection gate dielectric layer between the selection gate electrode and the substrate,
first impurity regions in the active region below the pair of anti-fuse gate electrodes; and
a second impurity region in the active region between the selection gate electrode and one of the pair of anti-fuse gate electrodes,
the first and second impurity regions having impurities of a second conductivity type, the first impurity regions having an impurity concentration less than an impurity concentration of the second impurity region,
wherein a portion of the device isolation layer is between the pair of anti-fuse gate electrodes,
the selection gate electrode has a width that is substantially the same as a width of the pair of anti-fuse gate electrodes,
the anti-fuse gate electrodes that are adjacent to each other are spaced apart from each other by a first distance, and
the anti-fuse gate electrodes and an adjacent selection gate electrode are spaced apart from each other by a second distance that is substantially the same as the first distance.
2. The semiconductor memory device of claim 1 , further comprising:
a first impurity region in the active region, the anti-fuse gate electrode extending across the first impurity region.
3. The semiconductor memory device of claim 1 , wherein the selection gate electrode extends across the active region.
4. The semiconductor memory device of claim 2 , further comprising:
a second impurity region in the active region between the selection gate electrode and the anti-fuse gate electrode, the second impurity region being connected to the first impurity region.
5. The semiconductor memory device of claim 4 , wherein the first and second impurity regions have impurities of a second conductivity type, the first impurity region having an impurity concentration that is lower than an impurity concentration of the second impurity region.