MEMS actuation systems and methods

1. A micro-electrical-mechanical system (MEMS) assembly comprising:

a stationary stage;

a rigid stage;

at least one flexure configured to slidably couple the stationary stage and the rigid stage;

at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage; and

at least one rigid electrode coupled and essentially orthogonal to the stationary stage when the at least one flexible electrode is coupled and essentially orthogonal to the rigid stage, and the at least one rigid electrode coupled and essentially orthogonal to the rigid stage when the at least one flexible electrode is coupled and essentially orthogonal to the stationary stage, wherein when the at least one flexible electrode is drawn towards the at least one rigid electrode, the rigid stage slides towards the at least one rigid electrode via the at least one flexure closing any gap between the at least one flexible electrode and the at least one rigid electrode.

2. The micro-electrical-mechanical system (MEMS) assembly of claim 1 wherein the at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage includes:

two or more flexible electrodes coupled and essentially orthogonal to one of the stationary stage and the rigid stage.

3. The micro-electrical-mechanical system (MEMS) assembly of claim 1 wherein the at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage includes:

two or more rigid electrodes coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.

4. The micro-electrical-mechanical system (MEMS) assembly of claim 1 wherein the at least one flexible electrode is configured to be energized at a first voltage potential.

5. The micro-electrical-mechanical system (MEMS) assembly of claim 1 wherein the at least one rigid electrode is configured to be energized at a second voltage potential.

6. The micro-electrical-mechanical system (MEMS) assembly of claim 1 wherein the at least one flexible electrode is generally curved in shape.

7. The micro-electrical-mechanical system (MEMS) assembly of claim 1 wherein the at least one flexible electrode is generally straight in shape.

8. The micro-electrical-mechanical system (MEMS) assembly of claim 1 wherein the at least one rigid electrode is generally rectangular in shape.

9. The micro-electrical-mechanical system (MEMS) assembly of claim 1 wherein the at least one rigid electrode includes at least one surface that is not orthogonal to the other of the stationary stage and the rigid stage.

10. A micro-electrical-mechanical system (MEMS) assembly comprising:

a stationary stage;

a rigid stage;

at least one flexure configured to slidably couple the stationary stage and the rigid stage;

at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, wherein the at least one flexible electrode is generally straight in shape; and

at least one rigid electrode coupled and essentially orthogonal to the stationary stage when the at least one flexible electrode is coupled and essentially orthogonal to the rigid stage, and the at least one rigid electrode coupled and essentially orthogonal to the rigid stage when the at least one flexible electrode is coupled and essentially orthogonal to the stationary stage, wherein when the at least one flexible electrode is drawn towards the at least one rigid electrode, the rigid stage slides towards the at least one rigid electrode via the at least one flexure closing any gap between the at least one flexible electrode and the at least one rigid electrode, wherein the at least one rigid electrode includes at least one surface that is not orthogonal to the stationary stage when the at least one flexible electrode is coupled and essentially orthogonal to the rigid stage, and wherein the at least one rigid electrode includes the at least one surface that is not orthogonal to the rigid stage when the at least one flexible electrode is coupled and essentially orthogonal to the stationary stage.

11. The micro-electrical-mechanical system (MEMS) assembly of claim 10 wherein the at least one flexible electrode is configured to be energized at a first voltage potential.

12. The micro-electrical-mechanical system (MEMS) assembly of claim 10 wherein the at least one rigid electrode is configured to be energized at a second voltage potential.

13. A micro-electrical-mechanical system (MEMS) actuator comprising:

a first micro-electrical-mechanical system (MEMS) assembly; and

at least a second micro-electrical-mechanical system (MEMS) assembly;

wherein each of the micro-electrical-mechanical system (MEMS) assemblies includes:

a stationary stage;

a rigid stage;

at least one flexure configured to slidably couple the stationary stage and the rigid stage;

at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage; and

at least one rigid electrode coupled and essentially orthogonal to the stationary stage when the at least one flexible electrode is coupled and essentially orthogonal to the rigid stage, and the at least one rigid electrode coupled and essentially orthogonal to the rigid stage when the at least one flexible electrode is coupled and essentially orthogonal to the stationary stage, wherein when the at least one flexible electrode is drawn towards the at least one rigid electrode, the rigid stage slides towards the at least one rigid electrode via the at least one flexure closing any gap between the at least one flexible electrode and the at least one rigid electrode.

14. The micro-electrical-mechanical system (MEMS) actuator of claim 13 wherein the at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage includes:

two or more flexible electrodes coupled and essentially orthogonal to one of the stationary stage and the rigid stage.

15. The micro-electrical-mechanical system (MEMS) actuator of claim 13 wherein the at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage includes:

two or more rigid electrodes coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.

16. The micro-electrical-mechanical system (MEMS) actuator of claim 13 wherein the at least one flexible electrode is generally curved in shape.

17. The micro-electrical-mechanical system (MEMS) actuator of claim 13 wherein the at least one flexible electrode is generally straight in shape.

18. The micro-electrical-mechanical system (MEMS) actuator of claim 13 wherein the at least one rigid electrode is generally rectangular in shape.

19. The micro-electrical-mechanical system (MEMS) actuator of claim 13 wherein the at least one rigid electrode includes at least one surface that is not orthogonal to the other of the stationary stage and the rigid stage.

20. The micro-electrical-mechanical system (MEMS) actuator of claim 13 wherein the first micro-electrical-mechanical system (MEMS) assembly and the at least a second micro-electrical-mechanical system (MEMS) assembly are coupled in a parallel configuration.

21. The micro-electrical-mechanical system (MEMS) actuator of claim 13 wherein the first micro-electrical-mechanical system (MEMS) assembly and the at least a second micro-electrical-mechanical system (MEMS) assembly are coupled in a series configuration.

22. The micro-electrical-mechanical system (MEMS) actuator of claim 13 wherein the first micro-electrical-mechanical system (MEMS) assembly and the at least a second micro-electrical-mechanical system (MEMS) assembly are coupled in a parallel-series configuration.