Via formation using directed self-assembly of a block copolymer
A method of forming an interconnect element includes forming a trench in a dielectric material. The trench has a width equal to twice a natural pitch of a block copolymer. The block copolymer includes a first polymer and a second polymer. The method includes filling the trench with the block copolymer.
1. A method of forming an interconnect element, the method comprising:
forming a trench in a dielectric material, the trench having a width equal to twice a natural pitch of a block copolymer, the block copolymer comprising a first polymer and a second polymer, wherein the natural pitch is a characteristic center-to-center distance of microdomains formed during an annealing process of the block copolymer; and
filling the trench with the block copolymer.
2. The method of claim 1 further comprising forming a pattern by directed self-assembly of the block copolymer.
3. The method of claim 2 , wherein the pattern includes a center portion comprising the first polymer, a middle portion comprising the second polymer, the middle portion being on opposite sides of the center portion, and an outer portion comprising the first polymer, the outer portion being on opposite sides of the middle portion.
4. The method of claim 3 , wherein forming the pattern by directed self-assembly of the block copolymer includes annealing.
5. The method of claim 3 , wherein the center portion has a width equal to one half the natural pitch of the block copolymer.
6. The method of claim 3 further comprising removing the second polymer from the middle portion.
7. The method of claim 6 further comprising removing the first polymer from the center portion.
8. The method of claim 7 further comprising removing the first polymer from the outer portion.
9. The method of claim 1 , wherein the block copolymer comprises a material selected from the group consisting of polystyrene-block-polymethylmethacrylate, polystyrene-block-polybutadiene, polystyrene-block-poly(2-vinyl pyridine), polystyrene-block-polydimethylsiloxane, and polystyrene-block-polyethylene oxide.
10. An interconnect apparatus comprising:
a trench in a dielectric material; and
a first polymer and a second polymer of a block copolymer in a pattern in the trench, the pattern comprising:
a center portion comprising the first polymer of the block copolymer, a width of the center portion being equal to one half a natural pitch of the block copolymer, wherein the natural pitch is a characteristic center-to-center distance of microdomains formed during an annealing process of the block copolymer;
a middle portion on opposite sides of the center portion, the middle portion comprising the second polymer of the block polymer material; and
an outer portion on opposite sides of the middle portion, the outer portion comprising the first polymer of the block polymer material.
11. The apparatus of claim 10 , wherein the middle portion comprises two parallel portions, a first end portion connecting first ends of the two parallel portion, and a second end portion connecting second ends of the two parallel portions, and a width of each of the two parallel portions of the middle portion is equal to one half a natural pitch of a block copolymer.
12. The apparatus of claim 11 , wherein the outer portion comprises two parallel portions, a first end portion connecting first ends of the two parallel portion, and a second end portion connecting second ends of the two parallel portions, and a width of each of the two parallel portions of the outer portion is equal to one quarter a natural pitch of a block copolymer.
13. The apparatus of claim 12 , wherein the pattern is circular in shape.
14. An interconnect apparatus comprising:
a trench in a dielectric material, the trench having a width equal to twice a natural pitch of a block copolymer, the block copolymer comprising a first polymer and a second polymer wherein the natural pitch is a characteristic center-to-center distance of microdomains formed during an annealing process of the block copolymer; and
the first polymer and the second polymer filling the trench.
15. The apparatus of claim 14 , wherein the first polymer and the second polymer are in a pattern, the pattern comprising a center portion comprising the first polymer, a middle portion comprising the second polymer, the middle portion being on opposite sides of the center portion, and an outer portion comprising the first polymer, the outer portion being on opposite sides of the middle portion.
16. The apparatus of claim 15 , wherein the center portion has a width equal to one half the natural pitch of the block copolymer.
17. The apparatus of claim 16 , wherein the middle portion comprises two parallel portions, a first end portion connecting first ends of the two parallel portion, and a second end portion connecting second ends of the two parallel portions.
18. The apparatus of claim 17 , wherein a width of each of the two parallel portions of the middle portion is equal to one half the natural pitch of the block copolymer.
19. The apparatus of claim 18 , wherein the outer portion comprises two parallel portions, a first end portion connecting first ends of the two parallel portion, and a second end portion connecting second ends of the two parallel portions.
20. The apparatus of claim 19 , wherein a width of each of the two parallel portions of the outer portion is equal to one quarter the natural pitch of the block copolymer.