Rolled-up power inductor and array of rolled-up power inductors for on-chip applications

1. An array of rolled-up power inductors for on-chip applications, the array comprising:

at least two rolled-up power inductors connected in series and formed from a stack of multilayer sheets, the at least two rolled-up power inductors comprising:

a first rolled-up power inductor comprising a first multilayer sheet in a rolled configuration about a first longitudinal axis, the first multilayer sheet comprising a first patterned conductive layer on a first strain-relieved layer,

a second rolled-up power inductor comprising a second multilayer sheet in a rolled configuration about a second longitudinal axis, the second rolled-up power inductor being laterally spaced apart from the first rolled-up power inductor, the second multilayer sheet comprising a second patterned conductive layer on a second strain-relieved layer,

wherein, prior to roll-up of the second and first multilayer sheets, the second multilayer sheet is disposed on the first multilayer sheet, and a through-thickness first via connects the second patterned conductive layer with the first patterned conductive layer, thereby enabling, after the roll-up, a series connection of the first and second rolled-up power inductors.

2. The array of claim 1 , wherein the first and second patterned conductive layers comprise graphene, the first and second patterned conductive layers being first and second patterned graphene layers.

3. The array of claim 2 , wherein each of the first and second patterned graphene layers comprises multi-layer graphene having from two to 20 atomic layers.

4. The array of claim 1 , further comprising a first thermal conduction layer between the first patterned conductive layer and the first strain-relieved layer, and

further comprising a second thermal conduction layer between the second patterned conductive layer and the second strain-relieved layer.

5. The array of claim 4 , wherein the first and second thermal conduction layers comprise a material selected from the group consisting of: diamond, boron nitride, graphite, carbon nanotubes, silicene, and a transition metal dichalcogenide.

6. The array of claim 1 , wherein the first and second strain-relieved layers comprise SiN x , where 0.5≤x≤1.5.

7. The array of claim 1 , wherein the rolled configuration of the first multilayer sheet and the rolled configuration of the second multilayer sheet each comprises multiple turns about the respective longitudinal axis, the multiple turns being in a range from 5 turns to 500 turns.

8. The array of claim 1 , wherein a lateral spacing of the first and second rolled-up power inductors is no greater than about 250 microns.

9. The array of claim 1 , wherein the first and second rolled-up power inductors are disposed substantially parallel to each other on a substrate.

10. The array of claim 1 , wherein the at least two rolled-up power inductors further include a third rolled-up power inductor comprising a third multilayer sheet in a rolled configuration about a third longitudinal axis, the third rolled-up power inductor being adjacent to and laterally spaced apart from the second rolled-up power inductor, the third multilayer sheet comprising a third patterned conductive layer on a third strain-relieved layer,

wherein, prior to roll-up of the third multilayer sheet, the third multilayer sheet is disposed on the second multilayer sheet, and a through-thickness second via connects the third patterned conductive layer with the second patterned conductive layer, thereby enabling, after the roll-up, a series connection of the second and third rolled-up power inductors.

11. The array of claim 1 comprising a total inductance of at least about 1 μH.

12. A rolled-up power inductor for on-chip applications, the rolled-up power inductor comprising:

a multilayer sheet in a rolled configuration comprising multiple turns about a longitudinal axis, the multilayer sheet comprising:

a patterned graphene layer on a strain-relieved layer with a thermal conduction layer therebetween, the patterned graphene layer comprising at least one graphene strip having a length extending in a rolling direction so as to wrap around the longitudinal axis in the rolled configuration, thereby forming an inductor cell of the rolled-up power inductor.

13. The rolled-up power inductor of claim 12 , wherein the thermal conduction layer comprises a material selected from the group consisting of diamond, boron nitride, graphite, carbon nanotubes, silicene, and a transition metal dichalcogenide.