UBM (under bump metal) electrode structure for radiation detector, radiation detector and production method thereof
View Patent ↗An UBM electrode structure body for a radiation detector and a radiation detector arranged with the UBM electrode structure body are provided for suppressing peeling and having high electrode adhesion. In addition, a manufacturing method of an UBM electrode structure body for a radiation detector and a manufacturing method of a radiation detector using the UBM electrode structure body are provided in which peeling does not occur during UBM structure formation, a solder bonding process or bonding of a signal line to a Pt layer. The UBM electrode structure body for a radiation detector of the present invention is arranged with a CdTe substrate or CdZnTe substrate and a Pt electrode layer arranged on the CdTe substrate or CdZnTe substrate, adhesion of the Pt electrode layer with respect to the CdTe substrate or the CdZnTe substrate being 0.5 N/cm or more.
1. A method of manufacturing an UBM electrode structure body for a radiation detector comprising:
preparing a CdTe substrate or CdZnTe substrate;
sequentially performing methanol washing and acetone washing of the CdTe substrate or the CdZnTe substrate;
washing the CdTe substrate or the CdZnTe substrate using a solvent comprised from hydrocarbons with a carbon number of 9 or more and 12 or less and containing no hydroxyl group; and
forming a Pt electrode layer by electroless plating,
wherein the electroless plating is performed by immersing the CdTe substrate or the CdZnTe substrate in 0.01% by weight or more and 0.1% by weight or less of a chloroplatinic acid aqueous solution while stirring the chloroplatinic acid aqueous solution heated to 45° C. or more and 55° C. or less.
2. The method of manufacturing the UBM electrode structure body for a radiation detector according to claim 1 , comprising: etching the CdTe substrate or the CdZnTe substrate with a bromine-methanol mixed solution or a bromine-bromic acid aqueous solution mixed solution, and forming the Pt electrode layer by the electroless plating.
3. The method of manufacturing the UBM electrode structure body for a radiation detector according to claim 1 , further comprising: forming a Ni layer above the Pt electrode layer with respect to the CdTe substrate or the CdZnTe substrate, and further forming an Au layer above the Ni layer to form an electrode body having an UBM structure.
4. The method of manufacturing the UBM electrode structure body for a radiation detector according to claim 2 , further comprising: forming a Ni layer above the Pt electrode layer with respect to the CdTe substrate or the CdZnTe substrate, and further forming an Au layer above the Ni layer to form an electrode body having an UBM structure.
5. A method of manufacturing the radiation detector comprising:
cutting the CdTe substrate or the CdZnTe substrate including the UBM electrode structure body for a radiation detector manufactured by the manufacturing method according to claim 1 to a predetermined shape to form a radiation detection element; and
connecting a detection circuit to the Pt electrode layer of the radiation detection element via a bump.
6. A method of manufacturing an UBM electrode structure body for a radiation detector comprising:
preparing a CdTe substrate or CdZnTe substrate;
sequentially performing methanol washing and acetone washing of the CdTe substrate or the CdZnTe substrate;
washing the CdTe substrate or the CdZnTe substrate using a solvent comprised from hydrocarbons with a carbon number of 9 or more and 12 or less and containing no hydroxyl group; and
forming a Pt electrode layer by electroless plating,
wherein
the CdTe substrate or the CdZnTe substrate includes impurities for controlling conductivity, and
the electroless plating is performed by immersing the CdTe substrate or the CdZnTe substrate in 0.01% by weight or more and 0.1% by weight or less of a chloroplatinic acid aqueous solution while stirring the chloroplatinic acid aqueous solution heated to 45° C. or more and 55° C. or less.
7. The method of manufacturing the UBM electrode structure body for a radiation detector according to claim 6 , comprising: etching the CdTe substrate or the CdZnTe substrate with a bromine-methanol mixed solution or a bromine-bromic acid aqueous solution mixed solution, and forming the Pt electrode layer by the electroless plating.
8. The method of manufacturing the UBM electrode structure body for a radiation detector according to claim 6 , further comprising: forming a Ni layer above the Pt electrode layer with respect to the CdTe substrate or the CdZnTe substrate, and further forming an Au layer above the Ni layer to form an electrode body having an UBM structure.
9. The method of manufacturing the UBM electrode structure body for a radiation detector according to claim 7 , further comprising: forming a Ni layer above the Pt electrode layer with respect to the CdTe substrate or the CdZnTe substrate, and further forming an Au layer above the Ni layer to form an electrode body having an UBM structure.