IP Library Granted Patent US 10,352,811
Granted Patent B2
US 10,352,811 · App. 15/712,916 · Granted Jul 16, 2019

Cold cathode ionization vacuum gauge

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Quick Facts
Patent No.
US 10,352,811
App. No.
15/712,916
Granted
Jul 16, 2019
Kind
B2
Abstract

A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

Claims (13)

1. A cold cathode ionization vacuum gauge assembly comprising:

a cold cathode ionization vacuum gauge comprising:

an extended anode electrode; and

a cathode electrode surrounding the anode electrode along its length;

an electronics module configured to be coupled to the vacuum gauge in either of first and second configurations, in the first configuration the electronics module being displaced from the vacuum gauge and coupled to the vacuum gauge by a cable and in the second configuration the electronics module being directly coupled to the vacuum gauge with an interface of physical mating surfaces complementary to physical mating surfaces of the vacuum gauge, the electronics module including electronics adapted to operate and read the vacuum gauge and further including an interlock on the electronics module configured to detect the presence of the vacuum gauge or the first end of the cable; and

the cable coupled between the electronics module and the vacuum gauge in the first configuration with the vacuum gauge and the electronics module displaced from each other, the cable having a first end and a second end, the first end being configured to imitate physical mating surfaces of the vacuum gauge to mate to the electronics module, and the second end being configured to imitate physical mating surfaces of the electronics module to mate to the vacuum gauge.

2. The cold cathode ionization vacuum gauge assembly of claim 1 , wherein the cold cathode ionization vacuum gauge further comprises an anode guard ring and the first end of the cable comprises a central anode connection pin, an anode guard ring insulator spaced from and surrounding the anode connection pin and a guard ring connection surrounding and spaced from the anode guard ring insulator.

3. The cold cathode ionization vacuum gauge assembly of claim 2 , wherein the first end of the cable further comprises an outer cylindrical insert having an interlock groove for detection by the electronics module.

4. The cold cathode ionization vacuum gauge assembly of claim 1 , wherein the cold cathode ionization vacuum gauge further comprises an anode guard ring and the second end of the cable comprises a central anode connection sleeve, a guard ring insulator mating sleeve and a guard ring mating sleeve.

5. A cable for connecting an electronics module to a cold cathode ionization vacuum gauge, with the vacuum gauge and electronics module displaced from each other in a first configuration, where the electronics module is configured to be displaced from the vacuum gauge, the electronics module also being configured to be directly coupled to the vacuum gauge with an interface complementary to the vacuum gauge, the cable having a first end and a second end, the first end being configured to imitate physical mating surfaces of the vacuum gauge to mate to the electronics module, and the second end being configured to imitate physical mating surfaces of the electronics module to mate to the vacuum gauge;

wherein the first end of the cable comprises a central anode connection pin, an anode guard ring insulator spaced from and surrounding the anode connection pin, a guard ring connection surrounding and spaced from the anode guard ring insulator, and a cathode electrode connection, and the second end of the cable comprises a central anode connection sleeve, a guard ring insulator mating sleeve, a guard ring mating sleeve, and a cathode electrode connection;

and wherein the first end of the cable further comprises an interlock feature to enable detection by the electronics module.

6. The cable of claim 5 , wherein the first end further comprises an outer cylindrical insert and the interlock feature is an interlock groove on the cylindrical insert.

Assignments (9)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048224/0939 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
ABL SECURITY AGREEMENT Recorded Nov 15, 2017
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 044455/0506 →
TERM LOAN SECURITY AGREEMENT Recorded Nov 15, 2017
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 044455/0355 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 22, 2017
From: BRUCKER, GERARDO A.; SWINNEY, TIMOTHY C.; KELLY, BRANDON J.; FUNARI, ALFRED A.; SCHOTT, MICHAEL N.; SCHARTAU, KRISTIAN S.
To: MKS INSTRUMENTS, INC.
Reel/Frame 043666/0273 →