Plasma processing apparatus and plasma processing method
A plasma processing apparatus processes a film layer to be processed disposed in advance on a surface of a wafer by using a plasma being switched on and off in a processing chamber in predetermined cycles and periods and includes a detection control unit for detecting a processing amount of the film layer on the surface of the wafer. The detection control unit includes a light source unit, a detection unit, and a film thickness/depth calculation unit. This detection control unit detects a plurality of times an amount indicating the intensity of light on a sample surface at predetermined cycles during a period in which the plasma is switched off while the wafer is being processed and detects a processing amount of the film layer on the sample surface by using the detected amount indicating the light intensity.
1. A plasma processing method that processes a film layer to be processed disposed in advance on a surface of a sample disposed and held on a sample stand disposed inside a processing chamber inside a vacuum vessel, by using plasma repeatedly being switched on and off in the processing chamber in predetermined cycles and periods, the plasma processing method comprising:
detecting, a plurality of times, an amount indicating the intensity of light from the sample surface at a predetermined cycle in a period during which the plasma is switched off while the sample is being processed;
detecting a processing amount of the film layer on the sample surface by using only data obtained from the detection in the step of detecting the amount indicating the intensity of light in the period during which the plasma is switched off; and
changing conditions of the processing based on the detected processing amount in the detecting the processing amount of the film layer on the sample surface.
2. The plasma processing method according to claim 1 , wherein in the detecting the intensity of light, an amount indicating the intensity of light emitted from the outside of the processing chamber and reflected by the sample surface in a period during which the plasma is switched off while the sample is being processed is detected.
3. The plasma processing method according to claim 1 , wherein in the detecting the intensity of light, the amount indicating the intensity of light from the sample surface at least once in a period during which the plasma is switched off while the sample is being processed at predetermined cycles over a plurality of periods in which the plasma is switched off is detected.
4. The plasma processing method according to claim 1 , wherein in the detecting the processing amount, the processing amount of the film layer on the sample surface is detected by using a result of averaging data obtained by detecting a plurality of times an amount indicating the intensity of light from the sample surface at predetermined cycles in each of periods during which the plasma is switched off while the sample is being processed.
5. The plasma processing method according to claim 1 , further comprising determining an end point of the processing by using a result of detecting the processing amount of the film layer on the sample surface, in the detecting the processing amount.