IP Library › Granted Patent US 10,360,314
Granted Patent B2
US 10,360,314 · App. 15/714,543 · Granted Jul 23, 2019

Method of forming conductive lines in circuits

Inventor: Chung-Hui Chen (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
G06F17/50G06F17/5077H01L21/0337H01L21/31144H01L21/76816H01L21/76838H01L23/528H01L27/0207H01L2027/11875H01L2924/0002
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Quick Facts
Patent No.
US 10,360,314
App. No.
15/714,543
Granted
Jul 23, 2019
Kind
B2
Abstract

A method of forming conductive lines in a circuit is disclosed. The method includes arranging a plurality of signal traces in a first set of signal traces and a second set of signal traces, fabricating, using a first mask, a first conductive line for a first signal trace of the first set of signal traces and fabricating, using a second mask, a second conductive line for a second signal trace of the second set of signal traces. Each signal trace of the first set of signal traces has a first width. Each signal trace of the second set of signal traces has a second width different from the first width. The arranging is based on at least a length of a signal trace of the plurality of signal traces.

Claims (80)

1. A method of forming conductive lines in a circuit, comprising:

arranging a plurality of signal traces in a first set of signal traces and a second set of signal traces;

fabricating, using a first mask, a first conductive line for a first signal trace of the first set of signal traces; and

fabricating, using a second mask, a second conductive line for a second signal trace of the second set of signal traces,

wherein

each signal trace of the first set of signal traces has a first width;

each signal trace of the second set of signal traces has a second width different from the first width; and

the arranging is based on at least a length of a signal trace of the plurality of signal traces.

2. The method of claim 1 , wherein the arranging is further based on at least one of:

a current flowing through the signal trace of the plurality of signal traces;

a resistivity of the signal trace of the plurality of signal traces; or

a resistivity-capacitive constant of the signal trace of the plurality of signal traces.

3. The method of claim 2 , wherein

the first mask is used before the second mask;

the second conductive line has a first resistivity if the second conductive line was fabricated by the second mask;

the second conductive line has a second resistivity if the second conductive line was fabricated by the first mask; and

the first resistivity of the second conductive line is lower than the second resistivity of the second conductive line.

4. The method of claim 2 , wherein

the first mask is used before the second mask;

the second conductive line has a first resistivity-capacitive constant if the second conductive line was fabricated by the second mask;

the second conductive line has a second resistivity-capacitive constant if the second conductive line was fabricated by the first mask; and

the first resistivity-capacitive constant of the second conductive line is lower than the second resistivity-capacitive constant of the second conductive line.

5. The method of claim 2 , wherein

the first mask is used before the second mask; and

the second conductive line has a first current capacity if the second conductive line was fabricated by the second mask;

the second conductive line has a second current capacity if the second conductive line was fabricated by the first mask; and

the first current capacity of the second conductive line is lower than the second current capacity of the second conductive line.

6. The method of claim 1 , wherein

the first mask is used before the second mask; and

a width of the first conductive line is larger than a width of the second conductive line.

7. The method of claim 1 , wherein

the first mask is used before the second mask; and

a width of the second conductive line is larger than a width of the first conductive line.

8. The method of claim 1 , wherein

the first mask is used before the second mask; and

a length of the first conductive line is larger than a predetermined value.

9. The method of claim 8 , wherein the predetermined value is about 5 μm.

10. The method of claim 8 , wherein the predetermined value includes at least one of

a predetermined width of a poly structure in a semiconductor structure;

a predetermined width of a metal structure in the semiconductor structure;

a predetermined width between the metal structure and the poly structure;

a predetermined width between two metal structures; or

a predetermined minimum width between two metal structures.

11. A method, comprising:

fabricating, using a first mask, a first conductive line;

fabricating, using a second mask, a second conductive line; and

fabricating, using the first mask, a third conductive line if a dimension of the first conductive line is larger than a corresponding dimension of the second conductive line; or

fabricating, using the second mask, the third conductive line if the dimension of the first conductive line is less than the corresponding dimension of the second conductive line,

wherein a first circuit element is coupled to a second circuit element by the third conductive line, and the first circuit element is separated from the second circuit element by a value.

12. The method of claim 11 , wherein the value includes at least one of:

a predetermined width of a poly structure in a semiconductor structure;

a predetermined width of a metal structure in the semiconductor structure;

a predetermined width between the metal structure and the poly structure;

a predetermined width between two metal structures; or

a predetermined minimum width between two metal structures.

13. The method of claim 11 , wherein

the first circuit element includes an output of a first inverter; and

the second circuit element includes an input of a second inverter.

14. The method of claim 13 , wherein

the first inverter and the second inverter are part of an inverter ring.

15. The method of claim 11 , wherein

the first circuit element includes a source of a first P-type transistor;

the second circuit element includes a source of a second P-type transistor; and

the first P-type transistor and the second P-type transistor form a current mirror.

16. The method of claim 11 , wherein

the first circuit element includes a drain of a P-type transistor;

the second circuit element includes a drain of an N-type transistor; and

the P-type transistor and the N-type transistor form an inverter.

17. A method, comprising:

fabricating, using a first mask, a first set of conductive lines having a first width;

fabricating, using a second mask, a second set of conductive lines having a second width, the first width being different from the second width; and

fabricating, using the first mask, a third set of conductive lines of a first circuit and a fourth set of conductive lines of a second circuit,

wherein each conductive line of the third set of conductive lines corresponds to each conductive line of the fourth set of conductive lines, and each conductive line of the third set of conductive lines is configured to carry a corresponding first current.

18. The method of claim 17 , further comprising:

fabricating, using the second mask, a fifth set of conductive lines of the first circuit and a sixth set of conductive lines of the second circuit,

wherein each conductive line of the fifth set of conductive lines corresponds to each conductive line of the sixth set of conductive lines, and each conductive line of the fifth set of conductive lines of the first circuit is configured to carry a corresponding second current, a value of the first current is less than a value of the second current.

19. The method of claim 17 , wherein

the first circuit and the second circuit are each part of a same current mirror.

20. The method of claim 17 , wherein

the first circuit and the second circuit are each part of a same symmetrical circuit.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 25, 2017
From: CHEN, CHUNG-HUI
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 043684/0248 →
Continuity (3)
Continuation 14709938 · May 12, 2015
Provisional Application 62000317 · May 19, 2014
Related Publication 20180011947A1 · Jan 11, 2018