Evanescently coupled piezoelectric acoustic devices
View Patent ↗An electro-acoustic device includes a plurality of suspended, piezoelectric, acoustically waveguiding membranes supported in a common plane. An input transducer coupled to one of the waveguiding membranes converts input electrical signals to traveling-wave acoustic signals. An output transducer coupled to one of the waveguiding membranes converts acoustic signals to electrical signals. At least two of the waveguiding membrane have parallel straight sections that are longer than a guided acoustic wavelength and that are mutually separated by an air gap having a width less than the guided acoustic wavelength.
1. An electro-acoustic device having a range of operating frequencies including a frequency f corresponding to a guided acoustic wavelength λ, comprising:
an input transducer configured to convert input electrical signals to traveling-wave acoustic signals;
an output transducer configured to convert acoustic signals to electrical signals;
a substrate; and
a plurality of suspended, piezoelectric, acoustically waveguiding membranes supported in a common plane by the substrate, wherein:
the input transducer is coupled to one of the waveguiding membranes;
the output transducer is coupled to one of the waveguiding membranes; and
the plurality of waveguiding membranes comprises at least a first and a second waveguiding membrane that have respective equally long straight sections that are parallel to each other, longer than the wavelength λ, and mutually separated by an air gap having a width less than the wavelength λ.
2. The electro-acoustic device of claim 1 , wherein the waveguiding membranes are composed of lithium niobate.
3. The electro-acoustic device of claim 1 , wherein the waveguiding membranes are composed of Z-cut lithium niobate.
4. The electro-acoustic device of claim 1 , wherein the height and the width of the waveguiding membranes are selected such that a quasi-SH mode is guided at the frequency f.
5. The electro-acoustic device of claim 1 , wherein the height and the width of the waveguiding membranes are selected such that a fundamental quasi-SH mode is guided at the frequency f.
6. The electro-acoustic device of claim 1 , wherein the input transducer is coupled so as to inject acoustic waves into the first waveguiding membrane and the output transducer is coupled so as to receive acoustic waves from the second waveguiding membrane.
7. The electro-acoustic device of claim 1 , wherein the input and output transducers are coupled to respective ends of the first waveguiding membrane and the second waveguiding membrane is conformed in a closed curve as a ring resonator.
8. The electro-acoustic device of claim 1 , wherein:
the first waveguiding membrane is conformed in a closed curve as a ring resonator and has two equally long and parallel straight sections on opposing sides of the closed curve;
the plurality of waveguiding membranes further comprises a third waveguiding membrane having a straight section equal in length and parallel to the straight sections of the first and second waveguiding membranes;
the second and third waveguiding membranes are positioned on opposing sides of the first waveguiding membrane such that each of them is separated by an air gap from a respective one of the two straight sections of the first waveguiding membrane, each said air gap having a width less than the wavelength λ;
at least one input transducer is coupled to the second waveguiding membrane; and
at least one output transducer is coupled to the third waveguiding membrane.
9. The electro-acoustic device of claim 1 conformed as a displacement sensor, wherein:
the substrate comprises a reference platform and a variable platform that is displaceable relative to the reference platform;
the first waveguiding membrane is attached to the reference platform; and
the second waveguiding membrane is attached to the variable platform such that relative displacement of the variable platform varies the width of the air gap.
10. The electro-acoustic device of claim 1 conformed as an inertial sensor, wherein:
the substrate comprises a reference platform and a variable platform that is displaceable relative to the reference platform;
the first waveguiding membrane is attached to the reference platform;
the second waveguiding membrane is attached to the variable platform such that relative displacement of the variable platform varies the width of the air gap; and
an inertial proof mass is attached to the variable platform.
11. The electro-acoustic device of claim 1 , wherein within the range of operating frequencies, each input and output transducer has an electrical impedance of 50Ω.
12. The electro-acoustic device of claim 1 , wherein the equally long straight sections that are parallel to each other and separated by air gaps have a length in the range 0.1 to 10 millimeters.
13. The electro-acoustic device of claim 1 , wherein each of the waveguiding membranes has a thickness that is smaller than the wavelength λ.
14. The electro-acoustic device of claim 1 , wherein each of the waveguiding membranes has a thickness and a width that are smaller than the wavelength λ.