Semiconductor structure and manufacturing method thereof
A semiconductor structure is provided. The semiconductor structure includes a substrate, a plurality of first gate structures, a plurality of second gate structures, a first strained region, and a second strained region. The substrate has a first region and a second region. The first gate structures are disposed in the first region on the substrate. The second gate structures are disposed in the second region on the substrate. The first strained region is formed in the substrate and has a first distance from an adjacent first gate structure. The second strained region is formed in the substrate and has a second distance from an adjacent second gate structure, wherein the second distance is greater than the first distance.
1. A semiconductor device manufacturing method, wherein a substrate has a first region and a second region, comprising:
forming a plurality of first gate structures in the first region on the substrate and a plurality of second gate structures in the second region on the substrate;
forming a mask layer on the plurality of first gate structures and the plurality of second gate structures, wherein the mask layer has an uppermost surface higher than uppermost surfaces of the plurality of first gate structures and the plurality of second gate structures;
planarizing the mask layer to obtain a flat surface;
forming an etch mask layer on the flat surface of the mask layer, wherein the etch mask layer has a plurality of first mask regions covering the plurality of first gate structures and extended by a first distance and a plurality of second mask regions covering the plurality of second gate structures and extended by a second distance, wherein the second distance is substantially greater than the first distance;
performing an etching process according to the etch mask layer to expose a plurality of surface regions of the substrate;
forming a plurality of strained regions in the plurality of surface regions in the substrate; and
removing the mask layer.
2. The semiconductor device manufacturing method of claim 1 , wherein the step of forming the plurality of strained regions comprises:
etching the substrate in the plurality of surface regions to form a plurality of recesses in the substrate;
removing the etch mask layer; and
forming an epitaxial layer in the plurality of recesses.
3. The semiconductor device manufacturing method of claim 2 , wherein a material of the epitaxial layer is SiGe.
4. The semiconductor device manufacturing method of claim 1 , wherein the second distance is at least 1.5 times the first distance.
5. The semiconductor device manufacturing method of claim 1 , wherein the first strained region and the second strained region are used to form source/drain regions with respect to the plurality of first gate structures and the plurality of second gate structures.
6. The semiconductor device manufacturing method of claim 1 , wherein the first region is a core device region and the second region is an I/O device region.
7. The semiconductor device manufacturing method of claim 1 , wherein a thickness of the mask layer is sufficient to completely fill a space between an adjacent pair in the plurality of first gate structures and the plurality of second gate structures.
8. A semiconductor device manufacturing method, wherein a substrate has a first region and a second region, comprising:
forming a plurality of first gate structures in the first region on the substrate and a plurality of second gate structures in the second region on the substrate;
forming a mask layer on the plurality of first gate structures and the plurality of second gate structures, wherein the mask layer is kept conformal to the plurality of first gate structures and the plurality of second gate structures;
forming an etch mask layer on the mask layer to cover the plurality of second gate structures and extended by a distance, wherein the etch mask layer does not cover the plurality of first gate structures;
performing an etching process using the etch mask layer to expose a plurality of surface regions of the substrate;
forming a plurality of strained regions in the plurality of surface regions in the substrate; and
removing the mask layer,
wherein the plurality of strained regions are used to form source/drain regions with respect to the plurality of first gate structures and the plurality of second gate structures.
9. The semiconductor device manufacturing method of claim 8 , wherein the step of forming the plurality of strained regions comprises:
etching the substrate in the plurality of surface regions to form a plurality of recesses in the substrate;
removing the etch mask layer; and
forming an epitaxial layer in the plurality of recesses.
10. The semiconductor device manufacturing method of claim 9 , wherein a material of the epitaxial layer is SiGe.
11. The semiconductor device manufacturing method of claim 8 , wherein a second distance from the strained regions to a directly adjacent second gate structure is at least 1.5 times a first distance from the strained regions to a directly adjacent first gate structure, wherein the second distance and the first distance are measured along a direction parallel with a top surface of the substrate.
12. The semiconductor device manufacturing method of claim 8 , wherein the first region is a core device region and the second region is an I/O device region.
13. The semiconductor device manufacturing method of claim 8 , wherein a thickness of the mask layer is within a range and conformal to the plurality of first gate structures and the plurality of second gate structures.